Patents by Inventor Mitsuhiro Nabeshima

Mitsuhiro Nabeshima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selective etching method
    Patent number: 9169437
    Abstract: A layer of a metal selected from titanium, niobium, tungsten, molybdenum, ruthenium, rhodium, arsenic, aluminum and gallium, an oxide of the metal, a nitride of the metal, silicon nitride, hafnium nitride, tantalum nitride, or an alloy of these metals, the layer being provided on an underlying base material selected from glass, silicon, copper and nickel, is selectively etched with an alkaline etching solution containing a predefined complexing agent.
    Type: Grant
    Filed: September 3, 2012
    Date of Patent: October 27, 2015
    Assignee: JCU CORPORATION
    Inventors: Christopher Cordonier, Mitsuhiro Nabeshima, Shingo Kumagai, Naoki Takahashi
  • SELECTIVE ETCHING METHOD
    Publication number: 20150048053
    Abstract: A layer of a metal selected from titanium, niobium, tungsten, molybdenum, ruthenium, rhodium, arsenic, aluminum and gallium, an oxide of the metal, a nitride of the metal, silicon nitride, hafnium nitride, tantalum nitride, or an alloy of these metals, the layer being provided on an underlying base material selected from glass, silicon, copper and nickel, is selectively etched with an alkaline etching solution containing a predefined complexing agent.
    Type: Application
    Filed: September 3, 2012
    Publication date: February 19, 2015
    Applicant: JCU CORPORATION
    Inventors: Christopher Cordonier, Mitsuhiro Nabeshima, Shingo Kumagai, Naoki Takahashi