Abstract: An XY stage for controlling a position of a slider part on a lattice platen in two-dimensional directions has a plurality of the slider parts whose positions are controlled independently. The plurality of the slider parts each has: a position controlling part for controlling a position of the slider part in an X axis direction and a Y axis direction; and a yawing correcting part for correcting a yawing of the slider part around a Z axis.

Abstract: A motor drive system used with industrial robots, processing machines, and the like comprising an external interface part ready for connecting a plurality of kinds of host controllers generating a command signal; a sensor interface part to which a motor rotation detecting sensor is connected; a main control part operating for feedback control of a motor according to signals provided by way of the interfaces; and a power amplification part for feeding a current to motor coils according to a control signal from the main control part and wherein the external interface part, the sensor interface part, the main control part, and the power amplification part are separate and modularized as cards. Advantageously, the various controllers, sensors and power systems are changeable to flexibly meet different user requirements.

Abstract: A direct drive motor for use with factory automation, wherein the motor is arranged to directly obtain rotary forces without using a final reduction gear. The direct drive motor has an inner stator, an outer rotor disposed outside the inner stator with a slight air gap formed therebetween, a cylindrical rotor hub to which the outer rotor hub is internally fixed and a bearing provided in an inner cylindrical portion of the rotor hub for rotatably supporting the rotor hub.

Abstract: A direct drive motor system for controlling driving of the joints of a multi-jointed robot, comprising a motor portion, a rotation detecting portion, a position control portion, a speed control portion, a driving circuit and a tuning portion, wherein the motor portion is of an inductor type, the rotation detection portion uses an optical rotary encoder or magnetic resolver, and the position control portion is arranged to control in a feedback manner the rotational position of the motor with a tertiary servo system with software. The system's driving circuit has a feedback control loop for the current of the motor coil, and a detection circuit for the current includes a small signal isolator. The tuning portion tunes the servo systems of the speed control portion and the position control portion. As a result, the system simultaneously satisfies various requirements of such a direct drive motor.

Abstract: A displacement transducer comprising a code disk on which a plurality of light permeable slits arranged with a fixed pitch are formed, a light source which emits light to the code disk, and an image sensor which receives the light from the light source through the light permeable slits. High resolution and fast response performance are realized by measuring a displacement of the code disk from the amount of the phase shift of a fundamental wave component contained in the output obtained from the image sensor. There is a further advantage of suppressing zero point return operation to a minimum as well as improving linearity of an image sensor.