Patents by Inventor Mitsuhiro Sakai

Mitsuhiro Sakai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing apparatus and processing method
    Patent number: 5815762
    Abstract: A development processing apparatus includes a processing unit for storing a substrate S and a processing solution supply nozzle arranged above the substrate S stored in the processing unit. A processing solution storage is formed inside the supply nozzle. A supply passage for supplying the processing solution into the solution storage is connected to the supply nozzle. A plurality of eject holes for ejecting the processing solution in the solution storage are formed in a lower surface of the supply nozzle. In this processing apparatus, the upper surface of the solution storage consists of at least one inclined surface, and an exhaust port is formed in a high portion of the inclined surface.
    Type: Grant
    Filed: June 19, 1997
    Date of Patent: September 29, 1998
    Assignee: Tokyo Electron Limited
    Inventors: Mitsuhiro Sakai, Masafumi Nomura, Kazuaki Tsunoda