Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.

Abstract: An inspection device improves accuracy characteristics of an (MRAM), the inspection device including a stage on which a MRAM element is fixed, and electromagnets generating a first magnetic field. A magnetic field having a component in a direction perpendicular to the stage is changeable from a first direction to a second direction according to a position on the stage. A second magnetic field in which a direction of a magnetic field component is parallel to the stage changes from a third direction to a fourth direction according to the position on the stage, an optical system illuminating the MRAM element with light including polarized light, and condensing reflected light from reflected illumination light from the MRAM element, and a detector detecting reflected light when the position of the MRAM element is changed, and when the position of the MRAM element in the second magnetic field is changed.

Abstract: An optical device is provided. The optical device includes: a light source; a pinhole plate arranged on a path of input light between the light source and an objective lens; an image sensor configured to detect a reflected light generated by the input light being reflected by a sample; and a noise filter arranged on the path of the reflected light between the image sensor and the objective lens, and the noise filter may remove a part of the reflected light generated by underlying layers below a measurement target layer of the sample.

Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.

Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.

Abstract: An optical device is provided. The optical device includes: a light source; a pinhole plate arranged on a path of input light between the light source and an objective lens; an image sensor configured to detect a reflected light generated by the input light being reflected by a sample; and a noise filter arranged on the path of the reflected light between the image sensor and the objective lens, and the noise filter may remove a part of the reflected light generated by underlying layers below a measurement target layer of the sample.

Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.

Abstract: An imaging apparatus includes an illumination light source to output an illumination light, an illumination optical system to transmit the illumination light toward a sample, an imaging optical system to transmit light reflected from the sample, a stage to move the sample in a predetermined transfer direction, and a photographing unit to receive the reflected light. The imaging apparatus may include one or more diffraction grids located at conjugate focal planes of the sample. The operation of the photographing unit may be synchronized with a movement of the sample by the stage to obtain an image in accordance with a time delay integration method.

Abstract: An imaging apparatus includes an illumination light source to output an illumination light, an illumination optical system to transmit the illumination light toward a sample, an imaging optical system to transmit light reflected from the sample, a stage to move the sample in a predetermined transfer direction, and a photographing unit to receive the reflected light. The imaging apparatus may include one or more diffraction grids located at conjugate focal planes of the sample. The operation of the photographing unit may be synchronized with a movement of the sample by the stage to obtain an image in accordance with a time delay integration method.

Abstract: Provided are a lighting apparatus, and an optical inspection apparatus and an optical microscope using the lighting apparatus. The lighting apparatus includes a light source that emits light, an optical device that outputs light that is more uniformly intense over a predetermined ray angle distribution than light input thereto; a multi-reflection device that reflects light multiple times, the multi-reflection device having a light incident surface receiving light and a light emission surface that emits multiply reflected light, and a light diffusion device that diffuses the light emitted from the light emission surface of the multi-reflection device. The light source, the optical device, the multi-reflection device, and light diffusion device share an optical path.

Abstract: An apparatus for detecting a defect of an object may include a light emitter configured to emit straight polarized lights having different polarized directions, a spatial filter having openings through which the straight polarized lights selectively pass, an optical member configured to condense the straight polarized lights, which pass through the openings, on the object, and a light detector configured to detect lights reflected from the object. Thus, the defect may be accurately detected in a short time.

Abstract: Provided are a lighting apparatus, and an optical inspection apparatus and an optical microscope using the lighting apparatus. The lighting apparatus includes a light source that emits light, an optical device that outputs light that is more uniformly intense over a predetermined ray angle distribution than light input thereto; a multi-reflection device that reflects light multiple times, the multi-reflection device having a light incident surface receiving light and a light emission surface that emits multiply reflected light, and a light diffusion device that diffuses the light emitted from the light emission surface of the multi-reflection device. The light source, the optical device, the multi-reflection device, and light diffusion device share an optical path.

Abstract: An apparatus for detecting a defect of an object may include a light emitter configured to emit straight polarized lights having different polarized directions, a spatial filter having openings through which the straight polarized lights selectively pass, an optical member configured to condense the straight polarized lights, which pass through the openings, on the object, and a light detector configured to detect lights reflected from the object. Thus, the defect may be accurately detected in a short time.