Abstract: A control device for an electric compressor, capable of successfully controlling a drive motor of the compressor in response to the load fluctuation having complicated frequency components even when the motor is controlled in a sensorless manner, is provided.

Abstract: A driving force controller for an electric vehicle includes a feed-forward compensator for computing a second target driving force so as to suppress overshooting of an actual driving force that is actually outputted, with respect to a first target driving force requested by a driver, the feed-forward compensator includes a first transfer function expressing a characteristic that the actual driving force becomes a predetermined response with respect to the first target driving force; and an inverse of a second transfer function approximately expressing a transmission characteristic between a input target driving force and the actual driving force in a control system except the feed-forward compensator.

Abstract: The present invention provides a stage apparatus including a stage being movable, comprising a driving unit configured to drive the stage by providing thrust to the stage, a measuring unit configured to measure a position of the stage, and a control unit configured to control the position of the stage by supplying, to the driving unit, a signal composed of a first signal for reducing a deviation between a current position of the stage and a target position, and a second signal for reducing vibration of the stage caused by a thrust ripple included in the thrust.

Abstract: A driving force controller for an electric vehicle includes a feed-forward compensator for computing a second target driving force so as to suppress overshooting of an actual driving force that is actually outputted, with respect to a first target driving force requested by a driver, the feed-forward compensator includes a first transfer function expressing a characteristic that the actual driving force becomes a predetermined response with respect to the first target driving force; and an inverse of a second transfer function approximately expressing a transmission characteristic between a input target driving force and the actual driving force in a control system except the feed-forward compensator.

Abstract: The driving force controller for an electric vehicle that controls driving force of a motor in the drive system of an electric vehicle includes: a target driving force setting unit for setting the target driving force based on a request from a driver; a dividing unit for computing a first motor torque command value by dividing the target driving force by a reduction ratio; a target acceleration computing unit for computing target acceleration by dividing the target driving force by inertia of the drive system; an actual acceleration computing unit for computing actual acceleration by differentiating actual rotational speed of the motor; a correction amount computing unit for computing a correction amount for reducing deviation between the target acceleration and the actual acceleration; and a command value computing unit for computing a second motor torque command value by adding the correction amount to the first motor torque command value.

Abstract: The driving force controller for an electric vehicle that controls driving force of a motor in the drive system of an electric vehicle includes: a target driving force setting unit for setting the target driving force based on a request from a driver; a dividing unit for computing a first motor torque command value by dividing the target driving force by a reduction ratio; a target acceleration computing unit for computing target acceleration by dividing the target driving force by inertia of the drive system; an actual acceleration computing unit for computing actual acceleration by differentiating actual rotational speed of the motor; a correction amount computing unit for computing a correction amount for reducing deviation between the target acceleration and the actual acceleration; and a command value computing unit for computing a second motor torque command value by adding the correction amount to the first motor torque command value.

Abstract: An electric motor control device is capable of reducing vibration in a speed fluctuation range at a high frequency. The electric motor control device includes a target rotation speed setting unit that sets the target rotation speed of an electric motor, a rotation speed estimation unit that calculates an estimated rotation speed of the electric motor, and a drive command signal generation unit that generates a drive command signal for the electric motor so as to eliminate a rotation speed difference between the target rotation speed and the estimated rotation speed. The rotation speed estimation unit includes an error calculation unit that calculates an error related to rotation of the electric motor and an estimated corrected rotation speed calculation unit that calculates an estimated corrected rotation speed by taking the error as input and correcting the estimated rotation speed.

Abstract: The present invention provides an exposure apparatus including a stage control system configured to control a stage for holding a substrate in accordance with a command value, a specifying unit configured to specify an exposure start time at which exposure on the substrate starts upon detecting exposure light illuminated on the substrate, and a main control system configured to calculate positions of the stage at a plurality of times in an exposure period for the substrate based on position information of the stage at an exposure start time specified by the specifying unit, obtain an average position of the stage in at least a partial period in the exposure period from the calculated positions of the stage at the plurality of times, and give a command value for matching the average position of the stage with a target position to the stage control system.

Abstract: The present invention provides a stage apparatus including a stage being movable, comprising a driving unit configured to drive the stage by providing thrust to the stage, a measuring unit configured to measure a position of the stage, and a control unit configured to control the position of the stage by supplying, to the driving unit, a signal composed of a first signal for reducing a deviation between a current position of the stage and a target position, and a second signal for reducing vibration of the stage caused by a thrust ripple included in the thrust.

Abstract: A control device for an electric compressor, capable of successfully controlling a drive motor of the compressor in response to the load fluctuation having complicated frequency components even when the motor is controlled in a sensorless manner, is provided.

Abstract: An electric motor control device is capable of reducing vibration in a speed fluctuation range at a high frequency. The electric motor control device includes a target rotation speed setting unit that sets the target rotation speed of an electric motor, a rotation speed estimation unit that calculates an estimated rotation speed of the electric motor, and a drive command signal generation unit that generates a drive command signal for the electric motor so as to eliminate a rotation speed difference between the target rotation speed and the estimated rotation speed. The rotation speed estimation unit includes an error calculation unit that calculates an error related to rotation of the electric motor and an estimated corrected rotation speed calculation unit that calculates an estimated corrected rotation speed by taking the error as input and correcting the estimated rotation speed.

Abstract: The present invention provides an exposure apparatus including a stage control system configured to control a stage for holding a substrate in accordance with a command value, a specifying unit configured to specify an exposure start time at which exposure on the substrate starts upon detecting exposure light illuminated on the substrate, and a main control system configured to calculate positions of the stage at a plurality of times in an exposure period for the substrate based on position information of the stage at an exposure start time specified by the specifying unit, obtain an average position of the stage in at least a partial period in the exposure period from the calculated positions of the stage at the plurality of times, and give a command value for matching the average position of the stage with a target position to the stage control system.

Abstract: A scanning exposure apparatus includes a first feedback loop including a first controlled object including an original stage and controlling a position of the original stage, a second feedback loop including a second controlled object including a substrate stage and controlling a position of the substrate stage, and a feedback unit including a first calculator and feed backing a synchronization error between the original stage and the substrate stage to the first feedback loop and the second feedback loop via the first calculator, wherein a transfer function from a first target value for the first controlled object to a first controlled value of the first controlled object and that from a second target value for the second controlled object to a second controlled value of the second controlled object are equal, and the exposure is performed at least during a period in which the original and the substrate are accelerated.

Abstract: A scanning exposure apparatus includes a first feedback loop including a first controlled object including an original stage and controlling a position of the original stage, a second feedback loop including a second controlled object including a substrate stage and controlling a position of the substrate stage, and a feedback unit including a first calculator and feed backing a synchronization error between the original stage and the substrate stage to the first feedback loop and the second feedback loop via the first calculator, wherein a transfer function from a first target value for the first controlled object to a first controlled value of the first controlled object and that from a second target value for the second controlled object to a second controlled value of the second controlled object are equal, and the exposure is performed at least during a period in which the original and the substrate are accelerated.