Patents by Inventor Mitsuo Natume

Mitsuo Natume has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Load port device
    Patent number: 7887276
    Abstract: A mount base is adapted to be fixed to a partition wall which is disposed between a stockyard for temporarily storing a wafer carrier which houses a wafer and a wafer processing device for processing the wafer. A wafer transfer window is provided on the mount base. A carrier stage has a table horizontally extended from a lower edge of the wafer transfer window and a carrier plate disposed on the table so as to support the wafer carrier and movable so as to transfer the wafer carrier to the processing device. A buffer stage has a buffer plate horizontally disposed below the table so as to temporarily store the wafer carrier.
    Type: Grant
    Filed: August 28, 2007
    Date of Patent: February 15, 2011
    Assignee: Shinko Electric Co., Ltd.
    Inventor: Mitsuo Natume
  • Load port device
    Publication number: 20080056860
    Abstract: A mount base is adapted to be fixed to a partition wall which is disposed between a stockyard for temporarily storing a wafer carrier which houses a wafer and a wafer processing device for processing the wafer. A wafer transfer window is provided on the mount base. A carrier stage has a table horizontally extended from a lower edge of the wafer transfer window and a carrier plate disposed on the table so as to support the wafer carrier and movable so as to transfer the wafer carrier to the processing device. A buffer stage has a buffer plate horizontally disposed below the table so as to temporarily store the wafer carrier.
    Type: Application
    Filed: August 28, 2007
    Publication date: March 6, 2008
    Applicant: Shinko Electric Co., Ltd.
    Inventor: Mitsuo Natume