Patents by Inventor Mitsuru Dohiwa

Mitsuru Dohiwa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11604097
    Abstract: A calibration method includes placing an LED light source having a given wavelength range inside a reference apparatus; acquiring first data as an emission intensity of light at a wavelength, a light amount of the light being adjusted in stages by changing the light amount output from the LED light source; storing the first data in a memory; placing the LED light source in a calibration target apparatus; acquiring second data as an emission intensity of light at a wavelength, a light amount of the light being adjusted in the stages by changing the light amount output from the LED light source; and calculating a calibration formula based on the first data stored in the memory and the second data.
    Type: Grant
    Filed: May 13, 2021
    Date of Patent: March 14, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kippei Sugita, Hana Sasaki, Kaoru Inaba, Mitsuru Dohiwa, Takashi Niinuma, Hikaru Fujiwara
  • Publication number: 20220341844
    Abstract: A calibration apparatus for calibrating an emission spectroscopy analyzer that monitors plasma generated in a plasma processing apparatus. The calibration apparatus comprises a base substrate; a plurality of light emitting devices disposed on the base substrate, each light emitting device of the plurality of light emitting devices is configured to emit light having different wavelengths from other light emitting devices of the plurality of light emitting devices; a reflector disposed on the base substrate, the reflector configured to reflect the light emitted by the plurality of light emitting devices toward an outside of the base substrate in a plan view; and a control device disposed on the base substrate, the control device configured to control the plurality of light emitting devices.
    Type: Application
    Filed: April 26, 2022
    Publication date: October 27, 2022
    Applicant: Tokyo Electron Limited
    Inventors: Yuto USUKI, Kippei SUGITA, Mitsuru DOHIWA, Takashi NIINUMA, Hisanori SAKAI
  • Publication number: 20210356324
    Abstract: A calibration method includes placing an LED light source having a given wavelength range inside a reference apparatus; acquiring first data as an emission intensity of light at a wavelength, a light amount of the light being adjusted in stages by changing the light amount output from the LED light source; storing the first data in a memory; placing the LED light source in a calibration target apparatus; acquiring second data as an emission intensity of light at a wavelength, a light amount of the light being adjusted in the stages by changing the light amount output from the LED light source; and calculating a calibration formula based on the first data stored in the memory and the second data.
    Type: Application
    Filed: May 13, 2021
    Publication date: November 18, 2021
    Inventors: Kippei Sugita, Hana Sasaki, Kaoru Inaba, Mitsuru Dohiwa, Takashi Niinuma, Hikaru Fujiwara
  • Patent number: 7587300
    Abstract: A parts management system which is capable of preventing use of a non-conforming part. A first computer for a user has component parts for an apparatus, delivered to the user. A second computer for a manufacturer is connected via a communication network to the first computer, and has a database provided therein which includes a list having fields for a plurality of kinds of management data for the apparatus component parts in association with each of ID numbers of the apparatus component parts. In the second computer, the management data on the apparatus component parts is acquired from the first computer via the communication network, and the acquired management data is compared with management data within the database.
    Type: Grant
    Filed: December 12, 2003
    Date of Patent: September 8, 2009
    Assignee: Tokyo Electron Limited
    Inventors: Mitsuru Dohiwa, Kazushi Tahara, Hiroshi Nishikawa
  • Publication number: 20040193437
    Abstract: A parts management system which is capable of preventing use of a non-conforming part. A first computer for a user has component parts for an apparatus, delivered to the user. A second computer for a manufacturer is connected via a communication network to the first computer, and has a database provided therein which includes a list having fields for a plurality of kinds of management data for the apparatus component parts in association with each of ID numbers of the apparatus component parts. In the second computer, the management data on the apparatus component parts is acquired from the first computer via the communication network, and the acquired management data is compared with management data within the database.
    Type: Application
    Filed: December 12, 2003
    Publication date: September 30, 2004
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Mitsuru Dohiwa, Kazushi Tahara, Hiroshi Nishikawa