Abstract: According to one aspect of the technique of the present disclosure, there is provided a method of displaying substrate arrangement data, including: (a) setting each of a transport parameter for determining at least an arrangement of substrates to be loaded into a substrate retainer and carrier information of a carrier storing the substrates to be loaded into the substrate retainer; (b) creating the substrate arrangement data of a case where the substrates are loaded into the substrate retainer based on the transport parameter and the carrier information set in (a); and (c) displaying the substrate arrangement data at least comprising data representing the arrangement of the substrates in a state where the substrates are loaded in the substrate retainer.

Abstract: Provided are a substrate processing apparatus, a method of manufacturing a semiconductor device, and a non-transitory computer-readable recording medium, which are capable of reducing an effect on a substrate, which is caused by a change in an atmosphere in a substrate storage container, by appropriately supplying an inert gas into the substrate storage container.

Abstract: Provided are a substrate processing apparatus, a method of manufacturing a semiconductor device, and a non-transitory computer-readable recording medium, which are capable of reducing an effect on a substrate, which is caused by a change in an atmosphere in a substrate storage container, by appropriately supplying an inert gas into the substrate storage container.

Abstract: To provide a substrate processing apparatus which can prevent a reduction in quality of a product, and damage to the apparatus. In a control program which operates on a substrate processing apparatus, a recipe storage portion and a parameter storage portion configure a data storage device which stores data relating to a control. On a user who has an authority being authenticated by an authentication process, the user carries out a data editing operation via an editing screen. A setting portion receives, via a UI device, operations for editing data stored by the data storage device. A timing portion measures a time between the operations received by the setting portion, and transmits the time to an operation control portion. In the event that the time measured by the timing portion has exceeded a prescribed time, the operation control portion prohibits the reception of the operations for editing the data.

Abstract: To provide a substrate processing apparatus which can prevent a reduction in quality of a product, and damage to the apparatus. In a control program which operates on a substrate processing apparatus, a recipe storage portion and a parameter storage portion configure a data storage device which stores data relating to a control. On a user who has an authority being authenticated by an authentication process, the user carries out a data editing operation via an editing screen. A setting portion receives, via a UI device, operations for editing data stored by the data storage device. A timing portion measures a time between the operations received by the setting portion, and transmits the time to an operation control portion. In the event that the time measured by the timing portion has exceeded a prescribed time, the operation control portion prohibits the reception of the operations for editing the data.