Abstract: A specimen positioning device (100) is for use in or with a charged particle beam system having a specimen chamber (1) and has: a base (10) provided with a hole (12) in operative communication with the specimen chamber (1); a specimen holder (20) movably mounted in the hole (12) and having a first portion (22) and a second portion (24); and a first portion support portion (40) supporting the first portion (22) in the specimen chamber (1). The second portion (24) supports the first portion (22) via a resilient member (34).

Abstract: A connector device for coupling a turbomolecular pump to an apparatus to be pumped. The connector device can suppress transmission of vibrations of relatively low frequencies. The pump has a rotor, a casing accommodating the rotor therein, and an intake port and an outlet port formed in the casing. The pump operates to suck gas from the intake port and to expel the gas from the outlet port by rotating the rotor within the casing at high speed. The connecting device has a connecting exhaust tube for connecting the intake port of the turbomolecular pump with the outlet port of the apparatus (such as a vacuum vessel) to be pumped. An annular weight is disposed around the outer periphery of the connecting exhaust tube. A viscoelastic member is interposed between the connecting exhaust tube and the weight to form a vibration absorber.

Abstract: A specimen positioning device (100) is for use in or with a charged particle beam system having a specimen chamber (1) and has: a base (10) provided with a hole (12) in operative communication with the specimen chamber (1); a specimen holder (20) movably mounted in the hole (12) and having a first portion (22) and a second portion (24); and a first portion support portion (40) supporting the first portion (22) in the specimen chamber (1). The second portion (24) supports the first portion (22) via a resilient member (34).

Abstract: A connector device for coupling a turbomolecular pump to an apparatus to be pumped. The connector device can suppress transmission of vibrations of relatively low frequencies. The pump has a rotor, a casing accommodating the rotor therein, and an intake port and an outlet port formed in the casing. The pump operates to suck gas from the intake port and to expel the gas from the outlet port by rotating the rotor within the casing at high speed. The connecting device has a connecting exhaust tube for connecting the intake port of the turbomolecular pump with the outlet port of the apparatus (such as a vacuum vessel) to be pumped. An annular weight is disposed around the outer periphery of the connecting exhaust tube. A viscoelastic member is interposed between the connecting exhaust tube and the weight to form a vibration absorber.

Abstract: An object-positioning device comprises a rod-like object holder inserted in the chamber of a charged-particle beam system for moving the object outside the chamber, a support for slideably supporting at least a part of the side surface of the object holder, thus making the rear end of the holder outside the chamber a free end, and a vibration-absorbing portion mounted on the rear end of the object holder. The vibration-absorbing portion has an operating range in which vibrational frequencies in a translational direction perpendicular to the longitudinal direction of the object holder are absorbed. The natural vibrational frequency of the object holder in the bending mode is included within the operating range of the vibration-absorbing portion.

Abstract: An object-positioning device comprises a rod-like object holder inserted in the chamber of a charged-particle beam system for moving the object outside the chamber, a support for slideably supporting at least a part of the side surface of the object holder, thus making the rear end of the holder outside the chamber a free end, and a vibration-absorbing portion mounted on the rear end of the object holder. The vibration-absorbing portion has an operating range in which vibrational frequencies in a translational direction perpendicular to the longitudinal direction of the object holder are absorbed. The natural vibrational frequency of the object holder in the bending mode is included within the operating range of the vibration-absorbing portion.