Abstract: A rotary valve comprising sliding members for supplying treatment gas containing water vapor to a plurality of treatment processes is provided. The rotary valve comprises sliding members (1, 2; 4, 6), through which open flow passages (8, 9, 10), having sliding surfaces slidable to each other and a mechanical seal mechanism for switching the flow passages (8, 9, 10) while sealing fluid by preliminarily pressing the sliding surfaces, wherein the sliding surface of each sliding members (1, 2; 4, 6) is made of hydrophobic material (2, 4) different in hardness from the other.

Abstract: A mechanical non-contact gas seal including a rotary scaling ring and a stationary sealing ring that is engaged and held in an inner periphery of a seal case by means of O-rings so as to move in an axial direction thereof. The O-rings engage with the outer periphery of the stationary sealing ring and come in press contact with the inner periphery of the seal case to seal a gap between the stationary sealing ring and the seal case while allowing the stationary sealing ring to move in an axial direction. A resin coating of a thickness in the range of 5 to 100 ?m is formed on the inner periphery of the seal case at least within a range in which the O-rings relatively move with the movement of the stationary sealing ring.

Abstract: The present invention provides a static pressure type non-contact gas seal which, even when supply of seal gas 6 to the space between sealing end surfaces 3a and 4a has stopped unexpectedly, can be safely used with no possibility that the sealing end surfaces 3a and 4a collide severely against each other and consequently the sealing end surfaces 3a and 4a are damaged or destructed. In this static pressure type non-contact gas seal, the seal gas 6 is supplied to the space between the sealing end surfaces 3a and 4a from a seal gas passage 5, thereby generating an opening force that acts on the stationary sealing ring 4 in a direction that the space between the sealing end surfaces 3a and 4a is opened.

Abstract: A mechanical seal 4 is a static pressure type non-contact gas seal, including a rotary sealing ring 5 that is fixed to a rotating shaft, and a stationary sealing ring 7 that is engaged and held in an inner periphery of a seal case 6 made of a metal by means of O-rings 12 so as to move in an axial direction thereof. The O-rings 12 are held engaging with the outer periphery of the stationary sealing ring 7, and come in press contact with the inner periphery of the seal case 6 so as to give a secondary seal to a gap between the stationary sealing ring 7 and the seal case 6, while allowing the stationary sealing ring 7 to move ih ng a thickness in the range of 5 to 100 ?m is formed on the inner periphery of the seal case 6 at least within a range in which the O-rings 12 relatively move in accordance with the movement of the stationary sealing ring 7 in the axial direction.

Abstract: A rotary valve comprising sliding members for supplying treatment gas containing water vapor to a plurality of treatment processes is provided. The rotary valve comprises sliding members (1, 2; 4, 6), through which open flow passages (8, 9, 10), having sliding surfaces slidable to each other and a mechanical seal mechanism for switching the flow passages (8, 9, 10) while sealing fluid by preliminarily pressing the sliding surfaces, wherein the sliding surface of each sliding members (1, 2; 4, 6) is made of hydrophobic material (2, 4) different in hardness from the other.

Abstract: The present invention provides a static pressure type non-contact gas seal which, even when supply of seal gas 6 to the space between sealing end surfaces 3a and 4a has stopped unexpectedly, can be safely used with no possibility that the sealing end surfaces 3a and 4a collide severely against each other and consequently the sealing end surfaces 3a and 4a are damaged or destructed. In this static pressure type non-contact gas seal, the seal gas 6 is supplied to the space between the sealing end surfaces 3a and 4a from a seal gas passage 5, thereby generating an opening force that acts on the stationary sealing ring 4 in a direction that the space between the sealing end surfaces 3a and 4a is opened.

Abstract: A balance ratio for a stationary seal ring is designed to allow a seal face to be opened when, with a rotary seal ring at standstill, steam of a predetermined pressure is supplied to an endo-fluid region while a sealing-fluid region is brought into an exhausting state. On the other hand, an O-ring constituting a secondary seal portion is retained by a groove formed in a flange portion of a seal case, thereby preventing a force on the O-ring from affecting the stationary seal ring even when the steam is supplied to the endo-fluid region.

Abstract: A balance ratio for a stationary seal ring is designed to allow a seal face to be opened when, with a rotary seal ring at standstill, steam of a predetermined pressure is supplied to an endo-fluid region while a sealing-fluid region is brought into an exhausting state. On the other hand, an O-ring constituting a secondary seal portion is retained by a groove formed in a flange portion of a seal case, thereby preventing a force on the O-ring from affecting the stationary seal ring even when the steam is supplied to the endo-fluid region.

Abstract: A balance ratio for a stationary seal ring is designed to allow a seal face to be opened when, with a rotary seal ring at standstill, steam of a predetermined pressure is supplied to an endo-fluid region while a sealing-fluid region is brought into an exhausting state. On the other hand, an O-ring constituting a secondary seal portion is retained by a groove formed in a flange portion of a seal case, thereby preventing a force on the O-ring from affecting the stationary seal ring even when the steam is supplied to the endo-fluid region.