Abstract: A horizontal substrate carrier is provided, for example a carrier for holding semiconductor substrates during horizontal thermal processing. The horizontal substrate carrier has asymmetrically placed support rails. One side of the horizontal substrate carrier has no upper rail while the other side of the horizontal substrate carrier has an upper rail placed at a relatively high location, for example at an angular location of 60° or more, more preferably of 70° or more, and most preferably at 90°. The side without an upper rail may be used for robotic loading of the horizontal substrate carrier. In a preferred embodiment, only three rails are provided: one upper rail on one side and two lower rails. The use and placement of these three rails can hold the substrate in precise uniform locations, minimize substrate movement, and minimize particle generation, all while allowing for easy robotic access.

Abstract: There is provided a semiconductor device manufacturing method which includes: loading a substrate with a magnetic substance film formed thereon into a process container; regulating an internal pressure of the process container to a first pressure lower than an atmospheric pressure; regulating the internal pressure of the process container from the first pressure to a second pressure higher than the first pressure; and magnetizing the magnetic substance film by applying a magnetic field to the magnetic substance film under the second pressure.

Abstract: Disclosed is a magnetic annealing apparatus including a processing container having a horizontally-elongated tubular shape and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside; a magnet provided to cover the heating unit from the outside of the heating unit; a substrate holder configured to hold the plurality of substrates within the processing container; and a heat shielding plate provided to surround a part of the substrate holder.

Abstract: Disclosed is a magnetic annealing apparatus including a processing container that performs a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a substrate holder that holds the plurality of substrates substantially horizontally in the processing container; a division heater including a plurality of sub-division heaters and covering a substantially entire circumferential surface of an outer periphery of a predetermined region of the processing container along a longitudinal direction; a magnet installed to cover an outside of the division heater; and a controller configured to feedback-control a temperature of a predetermined control target heater among the plurality of sub-division heaters, and to control temperatures of the plurality of sub-division heaters other than the predetermined control target heater based on a control output obtained by multiplying a control output of the predetermined control target heater and a predetermined ratio.

Abstract: An annealing system and method of operating is described. The annealing system includes a furnace having a vacuum chamber wall that defines a processing space into which a plurality of workpieces may be translated and subjected to thermal and magnetic processing, wherein the furnace further includes a heating element assembly having at least one heating element located radially inward from the vacuum chamber wall and immersed within an outer region of the processing space, and wherein the heating element is composed of a non-metallic, anti-magnetic material. The annealing system further includes a magnet system arranged outside the vacuum chamber wall of the furnace, and configured to generate a magnetic field within the processing space.

Abstract: There is provided a semiconductor device manufacturing method which includes: loading a substrate with a magnetic substance film formed thereon into a process container; regulating an internal pressure of the process container to a first pressure lower than an atmospheric pressure; regulating the internal pressure of the process container from the first pressure to a second pressure higher than the first pressure; and magnetizing the magnetic substance film by applying a magnetic field to the magnetic substance film under the second pressure.

Abstract: An annealing system and method of operating is described. The annealing system includes a furnace having a vacuum chamber wall that defines a processing space into which a plurality of workpieces may be translated and subjected to thermal and magnetic processing, wherein the furnace further includes a heating element assembly having at least one heating element located radially inward from the vacuum chamber wall and immersed within an outer region of the processing space, and wherein the heating element is composed of a non-metallic, anti-magnetic material. The annealing system further includes a magnet system arranged outside the vacuum chamber wall of the furnace, and configured to generate a magnetic field within the processing space.

Abstract: Disclosed is a magnetic annealing apparatus including a processing container having a horizontally-elongated tubular shape and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside; a magnet provided to cover the heating unit from the outside of the heating unit; a substrate holder configured to hold the plurality of substrates within the processing container; and a heat shielding plate provided to surround a part of the substrate holder.

Abstract: Disclosed is a magnetic annealing apparatus including a processing container that performs a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a substrate holder that holds the plurality of substrates substantially horizontally in the processing container; a division heater including a plurality of sub-division heaters and covering a substantially entire circumferential surface of an outer periphery of a predetermined region of the processing container along a longitudinal direction; a magnet installed to cover an outside of the division heater; and a controller configured to feedback-control a temperature of a predetermined control target heater among the plurality of sub-division heaters, and to control temperatures of the plurality of sub-division heaters other than the predetermined control target heater based on a control output obtained by multiplying a control output of the predetermined control target heater and a predetermined ratio.

Abstract: A very practical table apparatus is provided that can be made smaller and thinner without the need to stack a first table that moves in a first direction and a second table that moves in a second direction as in prior art. The table apparatus has a table (1) on which work is disposed, a first actuator (4) for moving the table (1) in the first direction a, and a second actuator (7) that is disposed on substantially the same plane as the first actuator, and that moves the table (1) in the second direction b, thereby allowing a single table (1) to be moved in the first direction a and second direction b without the need to stack two tables.

Abstract: A very practical table apparatus is provided that can be made smaller and thinner without the need to stack a first table that moves in a first direction and a second table that moves in a second direction as in prior art. The table apparatus has a table (1) on which work is disposed, a first actuator (4) for moving the table (1) in the first direction a, and a second actuator (7) that is disposed on substantially the same plane as the first actuator, and that moves the table (1) in the second direction b, thereby allowing a single table (1) to be moved in the first direction a and second direction b without the need to stack two tables.

Abstract: To provide a sliding apparatus which may depress a micro slip phenomenon without fail and realize the system with a simple structure and which is less expensive to save a cost and superior in practical use.

Abstract: To provide a method for mounting an outer sleeve onto a housing at low cost and with high precision in a linear sliding apparatus. The linear sliding apparatus has a shaft, and the outer sleeve is fitted around the shaft and slidable in a linear manner relative to the shaft. The method includes the steps of: engaging an outer circumference of the outer sleeve with a stationary member; and fixing the stationary member to the housing by a fastening member, thereby mounting the outer sleeve on the housing.

Abstract: To provide a method for mounting an outer sleeve onto a housing in low cost and with high precision in a linear sliding apparatus, the linear sliding apparatus has a shaft, and the outer sleeve is fitted around the shaft and slidable in a linear manner relative to the shaft. The method includes the steps of: engaging any desired position of an outer circumference of the outer sleeve with a stationary member in a convex and concave engagement; and fixing the stationary member to the housing by a fastening member, thereby mounting the outer sleeve on the housing.

Abstract: A contact layer having a low resistance in an LED is extended from an inside edge of a light take-out region in a light emitting dot to a central position thereof, whereby an input current in the light take-out region expands, while an electrode is extended from an inside edge of the light take-out region to the center of the light take-out region so as to shape like substantially a letter T with a length which is not over the center, whereby increase in an electrode covering ratio in the light take-out region can be suppressed. As a result, a uniform light output in the light take-out region can be attained, so that a light output can be remarkably improved.

Abstract: A bearing device is provided in which a contact portion between centering plates of an outer sleeve and a housing would neither be abraded nor deformed and which is superior in practicality, reduction of weight, durability and mass production even if the housing is made of synthetic resin and light in weight. The bearing device includes the housing (2) into which an outer sleeve (1) is inserted and a shaft (3) inserted into the outer sleeve (1). The housing (2) with the outer sleeve (1) is slidable in a linear relative to the shaft (3). The outer sleeve (1) has a ball endless recirculation path defined by a loading portion and a non-loading portion. Balls (5) are arranged in the ball endless recirculation path by a retainer (4). Centering plates (6) which may move finely are provided in the outer sleeve (1).

Abstract: A transporting apparatus used in testing a plurality of semiconductor devices includes a magazine in which a plurality of pallets are stacked in plural stages, each pallet with a plurality of semiconductor device placed thereon; a distributing stocker mechanism for placing the plurality of pallets in the magazine onto a carrier; a carrier transporting mechanism for transporting the carrier into a test station in a constant temperature room and transporting the carrier after to outside the constant temperature room; and a recovery stocker mechanism for recovering the plurality of pallets after test on the carrier into the magazine. Thus, the transporting apparatus with high installing area efficiency and high test efficiency can be fabricated at low production cost.

Abstract: An image forming apparatus has an exchangeable process cartridge which transfers a toner image from a latent image carrier onto a sheet. The process cartridge includes a frame; an endless latent image carrier provided on the frame; a charger provided on the frame for charging the latent image carrier; a transfer roller rotatably provided at a portion of the frame which faces the latent image carrier; and a cover for the transfer roller having guide ribs which guide a paper sheet. The transfer roller transfers a toner image from the latent image carrier onto a sheet.

Abstract: An apparatus for inspecting characteristics of semiconductor chips has a loading device for loading semiconductor chips onto a testing tray positioned by a servo motor, a CCD camera, an upper contact fixture controlled in X, Y, and .THETA. directions, and a lower contacting fixture driven by a cylinder. Positioning of the contact probe pins is accurately achieved by pattern processing and fully automated inspection is made possible. The apparatus is equipped with the same number of contact probe pins as the number of inspection points of a semiconductor chip; hence, all the cells of a semiconductor chip can be inspected as a unit. Therefore, the inspection can be made in a mode similar to practical conditions that occur after final assembly of the semiconductor chip.