Abstract: A semiconductor device manufacturing method including: forming a first interlayer insulating film on a semiconductor substrate; forming a first hole in the first interlayer insulating film; forming a barrier film inside the first hole; filling a conductive material in the first hole to form a first plug; forming a second interlayer insulating film on the first interlayer insulating film; forming a second hole reaching the first plug in the second interlayer insulating film; selectively etching an upper end of the barrier film inside the second hole; and forming a second plug for connection to the first plug inside the second hole.

Abstract: A semiconductor device manufacturing method including: forming a first interlayer insulating film on a semiconductor substrate; forming a first hole in the first interlayer insulating film; forming a barrier film inside the first hole; filling a conductive material in the first hole to form a first plug; forming a second interlayer insulating film on the first interlayer insulating film; forming a second hole reaching the first plug in the second interlayer insulating film; selectively etching an upper end of the barrier film inside the second hole; and forming a second plug for connection to the first plug inside the second hole.

Abstract: In a memory cell area of a semiconductor device, first, second, and third inter-layer insulating films respectively cover a cell transistor, a bit wiring line, and a capacitor which are connected to each other. In an adjacent peripheral circuit area, a peripheral-circuit transistor is covered with the first inter-layer insulating film, a first-layer wiring line connected to the peripheral-circuit transistor is provided on the first inter-layer insulating film and covered with the second inter-layer insulating film, and a second-layer wiring line is provided on the third inter-layer insulating film. In the memory cell area, a landing pad is provided on the second inter-layer insulating film and between the capacitor and a contact plug for connecting the capacitor to the cell transistor. An assist wiring line connected to the first-layer wiring line is provided on the main surface of the second inter-layer insulating film, on which the landing pad is provided.

Abstract: In a memory cell area of a semiconductor device, first, second, and third inter-layer insulating films respectively cover a cell transistor, a bit wiring line, and a capacitor which are connected to each other. In an adjacent peripheral circuit area, a peripheral-circuit transistor is covered with the first inter-layer insulating film, a first-layer wiring line connected to the peripheral-circuit transistor is provided on the first inter-layer insulating film and covered with the second inter-layer insulating film, and a second-layer wiring line is provided on the third inter-layer insulating film. In the memory cell area, a landing pad is provided on the second inter-layer insulating film and between the capacitor and a contact plug for connecting the capacitor to the cell transistor. An assist wiring line connected to the first-layer wiring line is provided on the main surface of the second inter-layer insulating film, on which the landing pad is provided.

Abstract: In a method for dry-etching a multilayer film which contains a titanium nitride film and which is formed on a silicon dioxide layer, after the multilayer film is etched by using a Cl2/BCl3/CHF3 gas while using a resist as a mask, but before the resist is ashed for removal of the resist, an overetching is carried out using a gas containing at least 50% of SF6, thereby to elevate removability of the resist by the ashing.

Abstract: An etching method can restrict side etching (corrosion) of an AlCu film as an upper layer upon etching of a TiN film as a lower layer. The etching method is characterized by, upon etching of a stacked film of AlCu film/TiN film with taking an oxide film as a mask, as a gas for performing etching of TiN film on a lower layer, a compound gas containing a chlorine atom is used, and using a mixture gas of the etching gas and an additive gas and not using a Cl2, a corrosion resistance of AlCu film against the etching gas can be improved.