Abstract: Disclosed is a mask defect repair apparatus that is capable of performing defect repair with high accuracy without exposure of a mask to air while being moved between the mask defect repair apparatus and an inspection device. The mask defect repair apparatus emits charged particle beams with an amount of irradiation therewith which is corrected by a correction unit while supplying gas to a defect of the mask, thereby forming a deposition film.

Abstract: Disclosed is a mask defect repair apparatus that is capable of performing defect repair with high accuracy without exposure of a mask to air while being moved between the mask defect repair apparatus and an inspection device. The mask defect repair apparatus emits charged particle beams with an amount of irradiation therewith which is corrected by a correction unit while supplying gas to a defect of the mask, thereby forming a deposition film.

Abstract: To automatically perform confirmation and adjustment of parameters for checking a model type of a magnetic bearing body and controlling the magnetic bearing body, the magnetic bearing body 20 is provided with a resistor 412 for identifying a model type and a body EEP-ROM 411 in which the model type and various characteristic values are stored. A control device 40 is provided with a device EEP-ROM 401 into which the model type and various characteristic values are stored and with a ROM table 402 into which various characteristics corresponding to a plurality of model types are stored. In the case where the various characteristics of the body EEP-ROM 411 and the device EEP-ROM 401 are normal but not identical with each other, the device EEP-ROM 401 is renewed to the content of the body EEP-ROM 411. Thus, even if the model type of the magnetic bearing body 20 is changed, the adjustment of the various characteristics is automatically performed without necessity for a special technician to adjust the device.