Patents by Inventor Mitsutoshi Yoshikawa

Mitsutoshi Yoshikawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electron beam apparatus
    Patent number: 8148684
    Abstract: An electron beam apparatus has the electron optical column for releasing an electron beam from the front-end portion after the beam is emitted from an electron beam source located on a rear-end portion of the column, a specimen chamber connected to a front-end portion of the column, and an aperture member withdrawably disposed in the front-end portion of the column within the specimen chamber. The apparatus further includes a rotating mechanism for rotating the aperture member along a given plane lying along the direction of a path of the beam. Thus, the aperture member can be attached and detached to and from the front-end portion of the column.
    Type: Grant
    Filed: June 10, 2010
    Date of Patent: April 3, 2012
    Assignee: JEOL Ltd.
    Inventor: Mitsutoshi Yoshikawa
  • Electron Beam Apparatus
    Publication number: 20110006209
    Abstract: An electron beam apparatus has the electron optical column for releasing an electron beam from the front-end portion after the beam is emitted from an electron beam source located on a rear-end portion of the column, a specimen chamber connected to a front-end portion of the column, and an aperture member withdrawably disposed in the front-end portion of the column within the specimen chamber. The apparatus further includes a rotating mechanism for rotating the aperture member along a given plane lying along the direction of a path of the beam. Thus, the aperture member can be attached and detached to and from the front-end portion of the column.
    Type: Application
    Filed: June 10, 2010
    Publication date: January 13, 2011
    Applicant: JEOL LTD.
    Inventor: Mitsutoshi Yoshikawa