Patents by Inventor Mitsuya INOUE

Mitsuya INOUE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11569558
    Abstract: A directional coupler includes: a hollow coaxial line including a central conductor forming a main line and an outer conductor surrounding the central conductor and having an opening formed therein; a dielectric substrate covering the opening and provided with film-shaped ground conductors, wherein a film-shaped ground conductor covers a rear surface of the dielectric substrate facing the central conductor via the opening and a film-shaped ground conductor covers a front surface of the dielectric substrate, respectively, and are grounded; and a coupling line provided on the rear surface of the dielectric substrate in a region surrounded by the ground conductor formed on the rear surface and serving as an auxiliary line, wherein the ground conductor formed on the front surface is provided with a conductor-removed portion in which a portion of a conductor film in a region facing the coupling line via the dielectric substrate is removed.
    Type: Grant
    Filed: January 22, 2021
    Date of Patent: January 31, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Isao Takahashi, Hiroyuki Miyashita, Yuki Osada, Mitsuya Inoue, Mitsutoshi Ashida
  • Patent number: 11411541
    Abstract: A device includes an amplifier for amplifying and supplying a high frequency power supplied to a load, a parameter detector for detecting a parameter of a current, a voltage, or a power from the amplifier to the load, a current supply unit for supplying a driving current for the amplifier, and an output unit for outputting a command signal for changing an amplification degree of the amplifier based on the detected parameter such that the parameter becomes a target value. The device further includes a first abnormality detector for detecting an abnormality by monitoring the command signal, and/or a current detector for detecting the driving current, a current data storage unit storing an upper and a lower limit value of the driving current, and a second abnormality detector for detecting the abnormality based on at least one of the upper limit value or the lower limit value.
    Type: Grant
    Filed: March 17, 2020
    Date of Patent: August 9, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Mitsuya Inoue, Mitsutoshi Ashida
  • Publication number: 20210234248
    Abstract: A directional coupler includes: a hollow coaxial line including a central conductor forming a main line and an outer conductor surrounding the central conductor and having an opening formed therein; a dielectric substrate covering the opening and provided with film-shaped ground conductors, wherein a film-shaped ground conductor covers a rear surface of the dielectric substrate facing the central conductor via the opening and a film-shaped ground conductor covers a front surface of the dielectric substrate, respectively, and are grounded; and a coupling line provided on the rear surface of the dielectric substrate in a region surrounded by the ground conductor formed on the rear surface and serving as an auxiliary line, wherein the ground conductor formed on the front surface is provided with a conductor-removed portion in which a portion of a conductor film in a region facing the coupling line via the dielectric substrate is removed.
    Type: Application
    Filed: January 22, 2021
    Publication date: July 29, 2021
    Inventors: Isao TAKAHASHI, Hiroyuki MIYASHITA, Yuki OSADA, Mitsuya INOUE, Mitsutoshi ASHIDA
  • Publication number: 20200313628
    Abstract: A device includes an amplifier for amplifying and supplying a high frequency power supplied to a load, a parameter detector for detecting a parameter of a current, a voltage, or a power from the amplifier to the load, a current supply unit for supplying a driving current for the amplifier, and an output unit for outputting a command signal for changing an amplification degree of the amplifier based on the detected parameter such that the parameter becomes a target value. The device further includes a first abnormality detector for detecting an abnormality by monitoring the command signal, and/or a current detector for detecting the driving current, a current data storage unit storing an upper and a lower limit value of the driving current, and a second abnormality detector for detecting the abnormality based on at least one of the upper limit value or the lower limit value.
    Type: Application
    Filed: March 17, 2020
    Publication date: October 1, 2020
    Inventors: Mitsuya INOUE, Mitsutoshi ASHIDA
  • Patent number: 9741498
    Abstract: Provided are a current collector which has an excellent high-rate property and exerts a sufficient safety function when employed in a secondary battery or a capacitor, as well as an electrode, a secondary battery or a capacitor in which said current collector is employed. According to the invention, a current collector is provided which comprises: metal foil; and a conductive layer with a film thickness of 0.1 ?m to 10 ?m formed on a surface of said metal foil. Here, said conductive layer includes a conductive material and a binder material. A melting point of said binder material is 80° C. to 150° C. Further, said binder material shows, in differential scanning calorimetry (DSC) in a range from room temperature to 200° C., one or more endothermic peaks in the heating-up process. In a case where said binder material shows two or more endothermic peaks, each difference between said peaks is 15° C. or more. Moreover, said binder material shows one or more exothermic peaks in the cooling-down process.
    Type: Grant
    Filed: July 11, 2013
    Date of Patent: August 22, 2017
    Assignees: Furukawa Electric Co., Ltd., UACJ FOIL Corporation, UACJ Corporation
    Inventors: Takahiro Iida, Yasumasa Morishima, Takayori Ito, Hidekazu Hara, Tsugio Kataoka, Mitsuya Inoue, Satoshi Yamabe, Osamu Kato, Yukiou Honkawa, Sohei Saito, Tatsuhiro Yaegashi
  • Patent number: 9563209
    Abstract: A raw material gas supply method for use in a film forming apparatus which forms a film on a substrate, includes supplying a carrier gas to a gas phase zone defined inside a raw material container accommodating a liquid or solid raw material, vaporizing the raw material, supplying a raw material gas containing the vaporized raw material from the raw material container to the film forming apparatus via a raw material gas supply path, measuring a flow rate of the vaporized raw material flowing through the raw material gas supply path, comparing the flow rate of the vaporized raw material obtained by the flow rate measurement unit with a predetermined target value, and controlling an internal pressure of the raw material container to be increased when the flow rate is higher than the predetermined target value, and to be decreased when the is lower than the predetermined target value.
    Type: Grant
    Filed: January 30, 2014
    Date of Patent: February 7, 2017
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Mitsuya Inoue, Makoto Takado
  • Publication number: 20160322641
    Abstract: A current collector having high safety, the current collector being capable of stably maintaining the PTC function even when the temperature further increases after realizing the PTC function when used for the electrode structure of electrical storage devices such as non-aqueous electrolyte batteries, electrical double layer capacitors, and lithium ion capacitors; electrode structures; electrical storage devices; and composition for current collectors, is provided. A current collector 100 including a conductive substrate 103 and a resin layer 105 provided onto at least one side of the conductive substrate 103, is provided. Here, the resin layer 105 is obtained by coating a paste onto the conductive substrate 103, followed by cross-linking. The paste includes polyolefin-based emulsion particles 125, a conductive material 121, and a cross-linker 131.
    Type: Application
    Filed: November 15, 2013
    Publication date: November 3, 2016
    Applicants: UACJ CORPORATION, UACJ FOIL CORPORATION, FURUKAWA ELECTRIC CO., LTD.
    Inventors: Sohei Saito, Osamu Kato, Yukiou Honkawa, Tatsuhiro Yaegashi, Tsugio Kataoka, Mitsuya Inoue, Satoshi Yamabe, Yasumasa Morishima, Takayori Ito, Hidekazu Hara, Takahiro Iida
  • Publication number: 20160126557
    Abstract: Provided is a current collector with low resistance and superior durability, which hardly suffer any change in the appearance of the current collector after the pressing process, and electrode structures, non-aqueous electrolyte batteries, and electrical storage devices using such current collector. A current collector, including an aluminum foil; and a conductive resin layer provided on at least one side of the aluminum foil; wherein the conductive resin layer includes a resin and conductive particles; the aluminum foil has a tensile strength of 180 MPa or higher; an indentation hardness at a surface of the conductive resin layer of the current collector is 600 MPa or lower; and an area occupying ratio of the conductive particles at the surface of the conductive resin layer is 45% or higher, is provided.
    Type: Application
    Filed: March 20, 2014
    Publication date: May 5, 2016
    Applicant: UACJ CORPORATION
    Inventors: Tsugio Kataoka, Mitsuya Inoue, Satoshi Yamabe, Osamu Kato, Yukiou Honkawa, Sohei Saito, Tatsuhiro Yaegashi
  • Publication number: 20160042878
    Abstract: A current collector with high safety which can realize both of a superior conductivity at normal temperature conditions and a superior shut down function at high temperature conditions, is provided. A current collector, including a conductive substrate; and a resin layer provided on at least one side of the conductive substrate, is provided. Here, the resin layer is formed with a paste containing an aggregate of polyolefin-based emulsion particles; and a conductive material. Further, the aggregate has an average particle diameter of 0.5 to 5 ?m.
    Type: Application
    Filed: March 26, 2014
    Publication date: February 11, 2016
    Applicants: UACJ CORPORATION, UACJ FOIL CORPORATION, FURUKAWA ELECTRIC CO., LTD.
    Inventors: Osamu Kato, Sohei Saito, Yukiou Honkawa, Tatsuhiro Yaegashi, Tsugio Kataoka, Mitsuya Inoue, Satoshi Yamabe, Yasumasa Morishima, Takayori Ito, Hidekazu Hara, Takahiro Iida
  • Publication number: 20150311001
    Abstract: A current collector which can achieve both of the improvement in battery characteristics by reducing the initial (at ambient temperature) interface resistance and the improvement in safety by the PTC function, when the current collector is used for the electrode structure of electrical storage devices such as non-aqueous electrolyte batteries, electrical double layer capacitors, and lithium ion capacitors; electrode structures; electrical storage devices; and composition for current collectors; are provided. A current collector, including: a conductive substrate 103; and a resin layer 105 provided on at least one side of the conductive substrate 103; is provided. Here, the resin layer is formed by coating a paste including: polyolefin-based emulsion particles 125; and a conductive material 121; onto the conductive substrate 103. The coating weight of the paste is 0.1 to 20 g/m2; and the porosity of the resin layer 105 is 10% (v/v) or less.
    Type: Application
    Filed: November 15, 2013
    Publication date: October 29, 2015
    Applicants: UACJ Corporation, UACJ Foil Corporation, Furukawa Electric Co., Ltd.
    Inventors: Osamu Kato, Sohei Saito, Yukiou Honkawa, Tatsuhiro Yaegashi, Tsugio Kataoka, Mitsuya Inoue, Satoshi Yamabe, Yasumasa Morishima, Takayori Ito, Hidekazu Hara, Takahiro Iida
  • Publication number: 20150303484
    Abstract: A current collector which can realize sufficient safety function even when the cell is deformed by external force or when the internal pressure is increased; and an electrode, a secondary battery, and a capacitor using the current collector; are provided. A current collector, including: a metal foil; and a conductive layer formed on a surface of the metal foil; is provided. Here, regarding the current collector, a temperature-resistance curve of the current collector obtained by sandwiching the current collector in between brass electrodes of 1 cm diameter, the measurement of resistance being performed with conditions of 15N of load between the electrodes and temperature being raised from ambient temperature at a rate of 10° C./min satisfies a relation of R(Ta+5)/R(Ta?5)?1, R(Ta+5) being resistance at temperature Ta+5° C. and R(Ta?5) being resistance at temperature Ta?5° C., Ta being a temperature higher than a temperature satisfying a relation of (R(T)/R(T?5))>2.
    Type: Application
    Filed: November 18, 2013
    Publication date: October 22, 2015
    Applicants: FURUKAWA ELECTRIC CO., LTD., UACJ FOIL CORPORATION, UACJ CORPORATION
    Inventors: Takahiro Iida, Yasumasa Morishima, Takayori Ito, Hidekazu Hara, Tsugio Kataoka, Satoshi Yamabe, Mitsuya Inoue, Osamu Kato, Sohei Saito, Yukiou Honkawa, Tatsuhiro Yaegashi
  • Publication number: 20150294802
    Abstract: Provided is a current collector which has a PTC layer having room for thermal expansion at elevated temperature while securing sufficient conductivity at normal temperature. According to the invention, a current collector comprising a conductive base material, and a resin layer formed on at least one surface of the conductive base material is provided. The resin layer contains an organic resin and conductive particles. A deposition amount of the resin layer on the conductive base material is 0.5 to 20 g/m2. Rz (ten point average roughness) of the surface of the resin layer is 0.4 to 10 ?m. Sm (average spacing of ruggedness) of the surface of the resin layer is 5 to 200 ?m. An average of resistance of the resin layer measured by the two-terminal method is 0.5 to 50 ?.
    Type: Application
    Filed: July 11, 2013
    Publication date: October 15, 2015
    Applicants: Furukawa Electric., Ltd., UACJ Foil Corporation, UACJ Corporation
    Inventors: Osamu Kato, Yasumasa Morishima, Takayori Ito, Hidekazu Hara, Takahiro Iida, Tsugio Kataoka, Mitsuya Inoue, Satoshi Yamabe, Yukiou Honkawa, Sohei Saito, Tatsuhiro Yaegashi
  • Publication number: 20150280241
    Abstract: The present invention provides a current collector having a conductive layer which is excellent in adhesion strength and can exhibit a PTC function for stably contributing to safety, when used for an electrode structure for non-aqueous electrolyte batteries or for electrical storage devices. A current collector, including a metal foil and a conductive layer formed on at least one side of the metal foil, the conductive layer being formed partially or entirely on the surface of the metal foil; is provided. Here, the conductive layer contains core shell particles including core particles 114 having insulating crystalline polymer as a main component, and a shell layer 116 having conductivity, the shell layer 116 being formed on the surface of the core particles 114.
    Type: Application
    Filed: September 18, 2013
    Publication date: October 1, 2015
    Applicants: Furukawa Electric Co., Ltd., UACJ Corporation, UACJ Foil Corporation
    Inventors: Hidekazu Hara, Takahiro Iida, Yasumasa Morishima, Takayori Ito, Sohei Saito, Osamu Kato, Yukiou Honkawa, Tatsuhiro Yaegashi, Tsugio Kataoka, Mitsuya Inoue, Satoshi Yamabe
  • Patent number: 9127358
    Abstract: A film forming apparatus for forming a polyimide film on a substrate installed within a film forming container. The apparatus includes: a first vaporizer configured to vaporize a first raw material in a solid state, and supply the vaporized first raw material gas to the substrate; a second vaporizer configured to vaporize a second raw material in a liquid state, and supply the vaporized second raw material gas to the substrate; a first pressure measurement unit configured to measure the internal pressure of the first vaporizer; a second pressure measurement unit configured to measure the internal pressure of the second vaporizer; and a controller configured to calculate a supply amount of the first and second raw material gases by the first and second pressure measurement units, respectively, and control the first and second vaporizers to supply the first and second raw material gases in a uniform amount.
    Type: Grant
    Filed: January 10, 2012
    Date of Patent: September 8, 2015
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Mitsuya Inoue, Yasunori Kumagai, Kippei Sugita
  • Publication number: 20150221452
    Abstract: Provided are a current collector which has an excellent high-rate property and exerts a sufficient safety function when employed in a secondary battery or a capacitor, as well as an electrode, a secondary battery or a capacitor in which said current collector is employed. According to the invention, a current collector is provided which comprises: metal foil; and a conductive layer with a film thickness of 0.1 ?m to 10 ?m formed on a surface of said metal foil. Here, said conductive layer includes a conductive material and a binder material. A melting point of said binder material is 80° C. to 150° C. Further, said binder material shows, in differential scanning calorimetry (DSC) in a range from room temperature to 200° C., one or more endothermic peaks in the heating-up process. In a case where said binder material shows two or more endothermic peaks, each difference between said peaks is 15° C. or more. Moreover, said binder material shows one or more exothermic peaks in the cooling-down process.
    Type: Application
    Filed: July 11, 2013
    Publication date: August 6, 2015
    Applicants: Furukawa Electric Co., Ltd., UACJ FOIL Corporation, UACJ Corporation
    Inventors: Takahiro Iida, Yasumasa Morishima, Takayori Ito, Hidekazu Hara, Tsugio Kataoka, Mitsuya Inoue, Satoshi Yamabe, Osamu Kato, Yukiou Honkawa, Sohei Saito, Tatsuhiro Yaegashi
  • Publication number: 20150221449
    Abstract: Provided is a current collector which can secure safety by certainly exhibiting the PTC function when used for an electrode structure of an electrical storage device such as non-aqueous electrolyte batteries, electrical double layer capacitors, lithium ion capacitors, and the like. Here, the current collector shall also be capable of being used for high-speed charge/discharge, having long life, being high in safety, and having excellent productivity. According to the present invention, a current collector 1 including a substrate 3, and a resin layer 5 formed on at least one side of the substrate 3, the resin layer 5 having conductivity, is provided. The current collector 1 satisfies the following conditions of: (1) a degree of swelling of the resin layer 5 with a non-aqueous electrolyte solution is 1% or more and 1000% or less at a PTC realization temperature, and (2) the PTC realization temperature is in the range from 65° C. to 200° C.
    Type: Application
    Filed: September 18, 2013
    Publication date: August 6, 2015
    Applicants: UACJ Corporation, UACJ Foil Corporation, Furukawa Electric Co., Ltd.
    Inventors: Sohei Saito, Osamu Kato, Yukiou Honkawa, Tatsuhiro Yaegashi, Tsugio Kataoka, Mitsuya Inoue, Satoshi Yamabe, Yasumasa Morishima, Takayori Ito, Hidekazu Hara, Takahiro Iida
  • Publication number: 20150214551
    Abstract: The present invention provides a current collector foil; and an electrode structure, lithium secondary battery or an electrical double layer capacitor using the current collector foil, which can achieve superior high rate characteristics. Provided is a current collector foil for forming thereon an active material layer containing active material particles, wherein: the current collector foil is provided with a roughened portion; a cross sectional curve of the roughened portion has a box counting dimension of 1.1 or higher; and an average length of waviness motif AW of the cross-sectional curve of the roughened portion is longer than twice of D10, D10 being a particle diameter of the active material particle in particle size cumulative distribution, the active material particle being used for the active material layer formed on the current collector foil.
    Type: Application
    Filed: July 11, 2013
    Publication date: July 30, 2015
    Applicants: Furukawa Electric Co., Ltd., UACJ Foil Corporation, UACJ Corporation
    Inventors: Takayori Ito, Yasumasa Morishima, Hidekazu Hara, Takahiro Iida, Tsugio Kataoka, Mitsuya Inoue, Satoshi Yamabe, Osamu Kato, Yukiou Honkawa, Sohei Saito, Tatsuhiro Yaegashi
  • Publication number: 20150140694
    Abstract: A gas supply device for intermittently supplying raw material gas into a film forming process unit that includes a raw material container for accommodating a raw material, a carrier gas supply unit for supplying carrier gas to evaporate the raw material, a raw material gas supply path for supplying the raw material gas and the carrier gas into the film forming process unit, a flow rate detector, a flow rate regulating valve, a raw material supply and block unit for supplying and blocking the raw material gas into the film forming process unit, and a control unit for outputting a control signal for intermittently supplying the raw material gas into the film forming process unit.
    Type: Application
    Filed: November 20, 2014
    Publication date: May 21, 2015
    Inventors: Mitsuya INOUE, Makoto TAKADO
  • Publication number: 20140209022
    Abstract: Provided is a raw material gas supply device for use in a film forming apparatus, which includes: a raw material container configured to accommodate a solid raw material; a carrier gas supply unit configured to supply a carrier gas to the container; a raw material gas supply path configured to supply a raw material gas containing a vaporized raw material from the container to the film forming apparatus; a flow rate measurement unit configured to measure a flow rate of the vaporized raw material; a pressure control unit configured to control an internal pressure of the container; and a control unit configured to control the pressure control unit to increase the internal pressure of the container when the measured flow rate of the vaporized raw material is higher than a predetermined target value, and to decrease the internal pressure when the measured flow rate is lower than the target value.
    Type: Application
    Filed: January 30, 2014
    Publication date: July 31, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Mitsuya INOUE, Makoto TAKADO
  • Publication number: 20140209021
    Abstract: Provided is a raw material gas supply device which includes: a raw material container; a carrier gas supply unit configured to supply a carrier gas into the container via a carrier gas flow path; a first flow rate measurement unit configured to measure a flow rate of the carrier gas flowing therethrough and output the same as a first flow rate measurement value; a raw material gas supply path configured to supply a raw material gas containing a vaporized raw material into a film forming apparatus; a second flow rate measurement unit configured to measure a flow rate of the raw material gas flowing therethrough and output the same as a second flow rate measurement value; and a flow rate calculation unit configured to calculate a difference between the first and second flow rate measurement values and to convert the difference into a vaporization flow rate of the raw material.
    Type: Application
    Filed: January 29, 2014
    Publication date: July 31, 2014
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Mitsuya INOUE, Makoto TAKADO, Atsushi ANDO