Patents by Inventor Mitsuya KAWATSUKI

Mitsuya KAWATSUKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Probe apparatus and probe method
    Patent number: 10310010
    Abstract: A probe apparatus includes a stage, a first and a second imaging device, a first and a second imaging optical unit, and a projection optical unit. The stage is movable in horizontal and vertical directions. The first imaging device picks up an image of a probe needle which is made to contact with an electrode of a device formed on a surface of the substrate. The first and second imaging optical units include optical systems for performing an image pickup by using the first and second imaging devices, respectively. The second imaging device picks up an image of the electrode held on the stage. The projection optical unit includes an optical system that projects an optical target mark, used in a position alignment of the first and the second imaging device, onto each of image forming units of the first and second imaging devices at the same time.
    Type: Grant
    Filed: December 2, 2015
    Date of Patent: June 4, 2019
    Assignees: TOKYO ELECTRON LIMITED, SEIWA OPTICAL CO., LTD.
    Inventors: Muneaki Tamura, Shinji Akaike, Kenta Saiki, Kazuhiko Koshimizu, Isao Okazaki, Mitsuya Kawatsuki, Kiyoshi Tsuda
  • PROBE APPARATUS AND PROBE METHOD
    Publication number: 20160161553
    Abstract: A probe apparatus includes a stage, a first and a second imaging device, a first and a second imaging optical unit, and a projection optical unit. The stage is movable in horizontal and vertical directions. The first imaging device picks up an image of a probe needle which is made to contact with an electrode of a device formed on a surface of the substrate. The first and second imaging optical units include optical systems for performing an image pickup by using the first and second imaging devices, respectively. The second imaging device picks up an image of the electrode held on the stage. The projection optical unit includes an optical system that projects an optical target mark, used in a position alignment of the first and the second imaging device, onto each of image forming units of the first and second imaging devices at the same time.
    Type: Application
    Filed: December 2, 2015
    Publication date: June 9, 2016
    Inventors: Muneaki TAMURA, Shinji AKAIKE, Kenta SAIKI, Kazuhiko KOSHIMIZU, Isao OKAZAKI, Mitsuya KAWATSUKI, Kiyoshi TSUDA