Patents by Inventor Miyoko Kawashima

Miyoko Kawashima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multiple exposure method
    Publication number: 20010036604
    Abstract: Disclosed is an exposure method in which a multiple exposure process including a first exposure for a first pattern and a second exposure for a second pattern is performed by use of a projection optical system to thereby resolve a desired pattern, wherein a numerical aperture NA1 of the projection optical system for the first pattern exposure and a numerical aperture NA2 of the projection optical system for the second pattern exposure are made different from each other.
    Type: Application
    Filed: March 2, 2001
    Publication date: November 1, 2001
    Inventor: Miyoko Kawashima