Abstract: In order to make it possible to ensure the axis alignment performance while reducing the processing cost, and to make a coupling structure compact to perform the coupling work and the detaching work of pipe members without difficulty even in a narrow work space, the coupling structure according to the invention includes a pipe coupling that couples a pair of pipe members each including a flange at an end portion in a state where the flanges of the pipe members face each other, an annular gasket interposed between the flanges of the pair of pipe members, and recesses formed individually in facing surfaces of the flanges facing each other, in which the annular gasket fitted into the respective recesses makes pipe axes of the pipe members and the annular gasket coincide with each other.

Abstract: A coupling ring is provided, including a series of unit members with adjacent unit members rotatably coupled to each other, and a fastener coupling unit members on both ends to each other. A concave groove provided to extend circumferentially is externally fitted into an outer circumference of each of two opposing flanges. The unit members on the both ends are coupled to each other by the fastener to be turned into an annular state. The fastener is fastened to thereby press an inclined surface. The flanges are pressure-bonded to each other by forces generated during pressing. A stopper member is provided to restrict a separation angle between the unit member on one end and an adjacent unit member to fall within a certain angle in an open state in which the unit members on the both ends are not coupled to each other provided on at least one of the unit members.

Abstract: An engagement section of a holder is engaged with a metal gasket, the gasket is received in a tubular section, and the tubular section is fitted in a step of a connection pipe. Another connection pipe is placed close to and facing the connection pipe that holds the gasket through the holder, and a center ring is installed surrounding the outer peripheries of the flanges. While a trapezoidal section having slopes which define both sides is inserted into a groove, center ring segments are closed to form a ring shape. A bolt which penetrates through a cutout of a segment is screwed into a threaded hole of the segment. The screwing of the bolt causes the amount of insertion of the trapezoidal section, which has slopes which define both sides, into the groove to be increased. As a result, the distance between flanges is reduced and the contact pressure of projections against both sides of the gasket is increased.

Abstract: To prevent attachment in an inclined state, a coupling ring with an inner concave groove is fitted to an outer circumferences of abutting flange portions, and is fastened to reduce an inner diameter thereof so that an inclined surface formed on each side surface of the concave groove presses an inclined surface formed on an opposite surface of each of the flange portions. The pair of flange portions are coupled by force generated at the time of pressing. An attachment correcting surface is provided on each of the flange portions or each of the pipes so that, only where the coupling ring is attached and fastened in an orientation inclined at an angle equal to or larger than a prescribed angle, the attachment correcting surface is abutted to a part of the coupling ring prior to completion of the fastening so as to prohibit the part from being brought closer.

Abstract: A coupling ring is provided, including a series of unit members with adjacent unit members rotatably coupled to each other, and a fastener coupling unit members on both ends to each other. A concave groove provided to extend circumferentially is externally fitted into an outer circumference of each of two opposing flanges. The unit members on the both ends are coupled to each other by the fastener to be turned into an annular state. The fastener is fastened to thereby press an inclined surface. The flanges are pressure-bonded to each other by forces generated during pressing. A stopper member is provided to restrict a separation angle between the unit member on one end and an adjacent unit member to fall within a certain angle in an open state in which the unit members on the both ends are not coupled to each other provided on at least one of the unit members.

Abstract: Engagement section 7a of holder 7 is engaged with a metal gasket 6, gasket 6 is received in tubular section 7b, and tubular section 7b is fitted in step 5a of connection pipe 1a. Then, another connection pipe 1b is placed close to and facing connection pipe 1a that holds gasket 6 through holder 7, and center ring 9 is installed surrounding the outer peripheries of flanges 2a, 2b. Subsequently, while a trapezoidal section having slopes 3a, 3b which define both sides is inserted into groove 14, segments 10a-10c are closed to form a ring shape. Bolt 11 which penetrates through cutout 12 of segment 10a is screwed into threaded hole 13 of segment 10c. The screwing of the bolt causes the amount of insertion of the trapezoidal section, which has slopes 3a, 3b which define both sides, into groove 14 to be increased. As a result, the distance between flanges 2a, 2b is reduced and the contact pressure of projections 4a, 4b against both sides of gasket 6 is increased.

Abstract: The present invention relates to a gas controlling device for integration such that it can be simply removed or mounted without disassembling a gas line in a high purity gas supply system for a semiconductor. The gas controlling device for integration comprises a main body which is vertically constituted and has a gas inlet passage and a gas outlet passage formed in a lower body, a nut mounted on an outer periphery of the lower body, a passage block having a gas inlet passage and a gas outlet passage, and a sealing means disposed between the lower body and the passage block. The lower body is inserted into the mounting hole of the passage block and is fixed to the passage block by screwing the nut. Since the gas controlling device for integration is fixed to the passage block by screwing the nut mounted on the outer periphery of the lower body, it can be removed or mounted only by loosening or tightening one nut without disassembling the gas line.

Abstract: An improved metal diaphragm valve is disclosed, in which the bed of the valve casing is made wider in its surface where the valve seat is mounted, than in conventional valves. The sufficiently spacious bed surface enables polishing easier, particularly in assembling micronized sizes of a valve. The simple design also makes it possible to use multiple-stage electropolishing, a technology used to obtain a mirror-like surface of casing bed. Since the bed of the valve casing has a wide enough space between the inner casing wall and the annular valve seat, the likelihood of fluid stagnation is lessened, causing fluid to flow smoothly from the inlet to outlet passage. The widened casing bed surface design is obtained because the annular valve seat caulked in position by expanding the rim of the inlet port in the fluid entrance passage that is bored concentrically of the central annular seat.

Abstract: Electrode terminals provided on a liquid crystal display element for connection to an external drive circuit are arranged in two rows, and lead wires for exterior electrode terminals are collectively passed through space portions provided in the course of the row composed of interior electrode terminals.