Abstract: According to one embodiment, an inspection system includes a holder, an irradiation part, a detector, and a controller. The irradiation part irradiates a first light toward a surface of a substrate held on the holder. The detector detects an intensity of a second light generated by reflection or scattering of the first light. The controller sets a first intensity range corresponding to an intensity of light reflected or scattered by a region not including slip of the surface. The controller sets a second intensity range corresponding to an intensity of light reflected or scattered by the slip. An upper limit and a lower limit of the second intensity range each are larger than an upper limit of the first intensity range. The controller extracts, as a length of the slip, a length of a region where the intensity of the second light is included in the second intensity range.

Abstract: According to one embodiment, an inspection system includes a holder, an irradiation part, a detector, and a controller. The irradiation part irradiates a first light toward a surface of a substrate held on the holder. The detector detects an intensity of a second light generated by reflection or scattering of the first light. The controller sets a first intensity range corresponding to an intensity of light reflected or scattered by a region not including slip of the surface. The controller sets a second intensity range corresponding to an intensity of light reflected or scattered by the slip. An upper limit and a lower limit of the second intensity range each are larger than an upper limit of the first intensity range. The controller extracts, as a length of the slip, a length of a region where the intensity of the second light is included in the second intensity range.

Abstract: The present invention provides an optically active poly(diphenylacetylene) compound represented by the following formula (I): [wherein each symbol is as described in the DESCRIPTION], and a production method thereof, an optical isomer separating agent containing the poly(diphenylacetylene) compound, and a packing material for a chiral column, containing the optical isomer separating agent coated on a carrier. According to the present invention, a practical optical isomer separation agent having a high optical resolution ability for a wide variety of racemic compounds and an optical isomer separation method can be provided.

Abstract: The present invention provides an optically active poly(diphenylacetylene) compound represented by the following formula (I): [wherein each symbol is as described in the DESCRIPTION], and a production method thereof, an optical isomer separating agent containing the poly(diphenylacetylene) compound, and a packing material for a chiral column, containing the optical isomer separating agent coated on a carrier. According to the present invention, a practical optical isomer separation agent having a high optical resolution ability for a wide variety of racemic compounds and an optical isomer separation method can be provided.