Patents by Inventor Miyuki Niikura

Miyuki Niikura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cantilever and measuring apparatus using it
    Patent number: 5929438
    Abstract: The present invention relates to a cantilever for separately observing a temperature profile of a surface of a sample and the topography thereof. The cantilever of the present invention comprises a support, a flexible plate one end of which is supported by the support, and a probe provided at the tip of the flexible plate, in which a thermocouple is provided in the probe.
    Type: Grant
    Filed: January 16, 1997
    Date of Patent: July 27, 1999
    Assignee: Nikon Corporation
    Inventors: Yoshihiko Suzuki, Miyuki Niikura, Tetsuji Onuki