Patents by Inventor Mizuki Suto

Mizuki Suto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning solution for removing residue
    Patent number: 6949495
    Abstract: A solution for washing away residue, comprising an aqueous solution of a water-soluble high molecular compound in which is dissolved at least one kind of dissolving agent selected from an amine and a fluoride. The washing solution is capable of effectively washing away the residue formed during the production of electronic circuits, is very lowly corrosive to the insulating films, low-dielectric interlayer insulating films and wirings, and offers an advantage of little generating foam.
    Type: Grant
    Filed: August 31, 2001
    Date of Patent: September 27, 2005
    Assignee: Tokuyama Corporation
    Inventors: Mizuki Suto, Ichiro Mikami, Tohru Nonaka, Seiji Tono
  • Cleaning solution for removing residue
    Publication number: 20030004075
    Abstract: A solution for washing away residue, comprising an aqueous solution of a water-soluble high molecular compound in which is dissolved at least one kind of dissolving agent selected from an amine and a fluoride. The washing solution is capable of effectively washing away the residue formed during the production of electronic circuits, is very lowly corrosive to the insulating films, low-dielectric interlayer insulating films and wirings, and offers an advantage of little generating foam.
    Type: Application
    Filed: April 25, 2002
    Publication date: January 2, 2003
    Inventors: Mizuki Suto, Ichiro Mikami, Tohru Nonaka, Seiji Tono