Patents by Inventor Mohamed Buhary Rinzan
Mohamed Buhary Rinzan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11929270Abstract: A monitoring device for monitoring a fabrication process in a fabrication system. The monitored fabrication system includes a process chamber and a plurality of flow components. A quartz crystal microbalance (QCM) sensor monitors one flow component of the plurality of flow components of the fabrication system and is configured for exposure to a process chemistry in the one flow component during the fabrication process. A controller measures resonance frequency shifts of the QCM sensor due to interactions between the QCM sensor and the process chemistry in the one flow component during the fabrication process. The controller determines a parameter of the fabrication process in the process chamber as a function of the measured resonance frequency shifts of the QCM sensor within the one flow component.Type: GrantFiled: May 16, 2022Date of Patent: March 12, 2024Inventors: Mohamed Buhary Rinzan, Chunhua Song, Steve James Lakeman
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Publication number: 20230135167Abstract: A system and method for monitoring a semiconductor process includes a plurality of sensors and a microcontroller. The plurality of sensors are disposed within a process chamber. The microcontroller receives data from the plurality of sensors and measures the uniformity of a semiconductor process based on the data received from the plurality of sensors.Type: ApplicationFiled: March 2, 2021Publication date: May 4, 2023Applicant: INFICON. Inc.Inventors: Matan Lapidot, Mohamed Buhary Rinzan, Chunhua Song
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Publication number: 20220285184Abstract: A monitoring device for monitoring a fabrication process in a fabrication system. The monitored fabrication system includes a process chamber and a plurality of flow components. A quartz crystal microbalance (QCM) sensor monitors one flow component of the plurality of flow components of the fabrication system and is configured for exposure to a process chemistry in the one flow component during the fabrication process. A controller measures resonance frequency shifts of the QCM sensor due to interactions between the QCM sensor and the process chemistry in the one flow component during the fabrication process. The controller determines a parameter of the fabrication process in the process chamber as a function of the measured resonance frequency shifts of the QCM sensor within the one flow component.Type: ApplicationFiled: May 16, 2022Publication date: September 8, 2022Applicant: INFICON, Inc.Inventors: Mohamed Buhary Rinzan, Chunhua Song, Steve James Lakeman
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Patent number: 11335575Abstract: A monitoring device for monitoring a fabrication process in a fabrication system. The monitored fabrication system includes a process chamber and a plurality of flow components. A quartz crystal microbalance (QCM) sensor monitors one flow component of the plurality of flow components of the fabrication system and is configured for exposure to a process chemistry in the one flow component during the fabrication process. A controller measures resonance frequency shifts of the QCM sensor due to interactions between the QCM sensor and the process chemistry in the one flow component during the fabrication process. The controller determines a parameter of the fabrication process in the process chamber as a function of the measured resonance frequency shifts of the QCM sensor within the one flow component.Type: GrantFiled: August 24, 2018Date of Patent: May 17, 2022Assignee: INFICON, Inc.Inventors: Mohamed Buhary Rinzan, Chunhua Song, Steve James Lakeman
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Patent number: 11175323Abstract: Devices, systems and methods for process monitoring are presented. For instance, the device includes a crystal and a reactance sensor. The crystal is connected to a frequency measurement circuit. The reactance sensor is connected to the crystal. The reactance sensor is configured to detect a change in a process parameter. The frequency measurement circuit detects the change in the process parameter as a change in the frequency of the crystal. In another example, the system includes a reactance sensor and a measurement device. The reactance sensor is disposed in a process chamber, and has a variable reactance responsive to a change in a process parameter. The measurement device is disposed outside the process chamber and has a frequency measurement circuit. The frequency measurement circuit includes a crystal and is connected to the reactance sensor, and detects the change in the process parameter as a change in the frequency of the crystal.Type: GrantFiled: March 17, 2017Date of Patent: November 16, 2021Assignee: INFICON, INC.Inventor: Mohamed Buhary Rinzan
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Patent number: 10704150Abstract: A system for monitoring thin film deposition is described. The system includes a quartz crystal and a synthesizer to generate a modulated signal. The modulated signal is to be grounded through the quartz crystal. The system also includes a phase detector to determine a phase of the modulated signal from the quartz crystal in order to monitor thin film deposition. A modulation index can be selected so that, at resonance, high frequency of the signal matches the crystal frequency.Type: GrantFiled: October 3, 2014Date of Patent: July 7, 2020Assignee: INFICON, Inc.Inventor: Mohamed Buhary Rinzan
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Publication number: 20200176291Abstract: A monitoring device for monitoring a fabrication process in a fabrication system. The monitored fabrication system includes a process chamber and a plurality of flow components. A quartz crystal microbalance (QCM) sensor monitors one flow component of the plurality of flow components of the fabrication system and is configured for exposure to a process chemistry in the one flow component during the fabrication process. A controller measures resonance frequency shifts of the QCM sensor due to interactions between the QCM sensor and the process chemistry in the one flow component during the fabrication process. The controller determines a parameter of the fabrication process in the process chamber as a function of the measured resonance frequency shifts of the QCM sensor within the one flow component.Type: ApplicationFiled: August 24, 2018Publication date: June 4, 2020Applicant: INFICON. Inc.Inventors: Mohamed Buhary Rinzan, Chunhua Song, Steve James Lakeman
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Publication number: 20180267086Abstract: Devices, systems and methods for process monitoring are presented. For instance, the device includes a crystal and a reactance sensor. The crystal is connected to a frequency measurement circuit. The reactance sensor is connected to the crystal. The reactance sensor is configured to detect a change in a process parameter. The frequency measurement circuit detects the change in the process parameter as a change in the frequency of the crystal. In another example, the system includes a reactance sensor and a measurement device. The reactance sensor is disposed in a process chamber, and has a variable reactance responsive to a change in a process parameter. The measurement device is disposed outside the process chamber and has a frequency measurement circuit. The frequency measurement circuit includes a crystal and is connected to the reactance sensor, and detects the change in the process parameter as a change in the frequency of the crystal.Type: ApplicationFiled: March 17, 2017Publication date: September 20, 2018Inventor: Mohamed Buhary Rinzan
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Publication number: 20160215397Abstract: A system for monitoring thin film deposition is described. The system includes a quartz crystal and a synthesizer to generate a modulated signal. The modulated signal is to be grounded through the quartz crystal. The system also includes a phase detector to determine a phase of the modulated signal from the quartz crystal in order to monitor thin film deposition. A modulation index can be selected so that, at resonance, high frequency of the signal matches the crystal frequency.Type: ApplicationFiled: October 3, 2014Publication date: July 28, 2016Inventor: Mohamed Buhary Rinzan