Patents by Inventor Mohamed El Bouanani

Mohamed El Bouanani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for removing contaminants on a substrate
    Patent number: 6933235
    Abstract: A method of processing a substrate is disclosed. The method includes depositing a dielectric layer having a metal oxide on a substrate. A portion of the dielectric layer is removed to form a dielectric structure, thereby exposing a surface of the substrate. For example, the dielectric layer may be patterned using standard photolithographic techniques and etching. An oxide layer is then formed on the exposed surface of the substrate. The oxide layer may be formed using ozone that is generated using ultraviolet radiation. After the oxide layer is formed, it is removed using an etching process.
    Type: Grant
    Filed: November 21, 2002
    Date of Patent: August 23, 2005
    Assignee: The Regents of the University of North Texas
    Inventors: Manuel A. Quevedo-Lopez, Robert M. Wallace, Mohamed El Bouanani, Bruce E. Gnade
  • Method for removing contaminants on a substrate
    Publication number: 20040102009
    Abstract: A method of processing a substrate is disclosed. The method includes depositing a dielectric layer having a metal oxide on a substrate. A portion of the dielectric layer is removed to form a dielectric structure, thereby exposing a surface of the substrate. For example, the dielectric layer may be patterned using standard photolithographic techniques and etching. An oxide layer is then formed on the exposed surface of the substrate. The oxide layer may be formed using ozone that is generated using ultraviolet radiation. After the oxide layer is formed, it is removed using an etching process.
    Type: Application
    Filed: November 21, 2002
    Publication date: May 27, 2004
    Applicant: REGENTS OF THE UNIVERSITY OF NORTH TEXAS
    Inventors: Manuel A. Quevedo-Lopez, Robert M. Wallace, Mohamed El Bouanani, Bruce E. Gnade