Abstract: Methods, systems and computer-readable storage media relate to determining respiratory motion from motion data of a target to be treated. The methods may include processing motion data of a target to be treated obtained from at least one marker for at least one period. Each period including a plurality of time intervals. The processing including processing the motion data to determine an isocenter for each time interval along at least one of a plurality of axes of motion. The method may include determining at least one component of the motion data in at least one axis, the at least component corresponding to a subset of the motion data having a discrete value and/or a range of values; and determining respiratory motion from at least one component of the motion data. Radiotherapy treatment can be improved by determining the respiratory motion and the impact of respiration of a target.

Abstract: A novel technique to detect oxydonor generation in semiconductor wafers. Oxydonor generation in a P-type substrate may be sufficient to create a P-N junction within the substrate which may adversely affect device performance. A technique of the present invention is a two-step process for determining the presence of such an oxydonor generated P-N junction. For a capacitor device, the capacitance of the device is measured under varying test voltages to determine a capacitance-voltage response. Then a second capacitance-voltage response is measured when the device is subjected to an external energy source. For a diode device, the forward current is measured with the device under varying test voltages to determine a current-voltage response. Then a second currrent-voltage response is measured when the device is subjected to an external energy source. By comparing device response with and without the application of external energy, a device having oxydonor generation problems is efficiently detected.