Patents by Inventor Mohammad Saghayezhian

Mohammad Saghayezhian has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ELECTRICAL ISOLATION OF GAS FEED FOR ION BEAM SYSTEM
    Publication number: 20250226176
    Abstract: A gas inlet for a high voltage ion beam system, the gas inlet providing an insulating barrier between the high voltage components to which the gas is supplied and the grounded gas supply lines. The gas inlet inhibits electrical breakdown of the system by inhibiting energized particles, or plasma, from contacting the grounded gas supply lines. The gas inlet maximizes the path length to the grounded gas supply line, has electrically insulating material in the path with a designed gas conductance path, and utilizes a transverse magnetic field.
    Type: Application
    Filed: January 7, 2025
    Publication date: July 10, 2025
    Inventors: Mohammad SAGHAYEZHIAN, Binyamin RUBIN, Kirill GUTSOL
  • PLASMA VESSEL CLEANING FOR ION BEAM SYSTEM
    Publication number: 20250046586
    Abstract: An in situ cleaning of the vessel of an ion deposition/etching system that includes utilizing the E-mode of the system and increasing plasma potential to remove material deposited on the vessel walls. The method includes operating the system with plasma only, no grid bias, minimal gas flow and high RF power level. During this cleaning mode, radially moving capacitively coupled ions impinge on the vessel inner wall, etching undesired back scattered material from the wall.
    Type: Application
    Filed: July 26, 2024
    Publication date: February 6, 2025
    Inventors: Mohammad SAGHAYEZHIAN, Binyamin RUBIN
  • INTEGRATED SYNCHRONOUS SYSTEM FOR GRIDDED ION SOURCES
    Publication number: 20240387142
    Abstract: An ion beam system including an integrated power control system between the power supplies and the grids. The power control system includes a fast, high-power solid state switch such as an insulated gate bipolar transistor (IGBT). The power control system may include a resistor array, e.g., to dissipate current surge. The integrated power control system provides synchronous operation of the grid power supplies.
    Type: Application
    Filed: May 10, 2024
    Publication date: November 21, 2024
    Inventors: Mohammad SAGHAYEZHIAN, Binyamin RUBIN, Kirill GUTSOL
  • GRID SURFACE CONDITIONING FOR ION BEAM SYSTEM
    Publication number: 20240203683
    Abstract: An in situ cleansing of grids of an ion beam system, such as a deposition and/or etching system, that includes applying a negative bias on the downstream-most grid and etching redeposited material from the grid. Any or all of the chamber pressure of the system, the extraction current in the ion beam source, the beam divergence, and perveance can be adjusted with the deceleration grid bias. The methods of this disclosure can be applied to any gridded ion source systems, including those with an assist ion beam.
    Type: Application
    Filed: November 8, 2023
    Publication date: June 20, 2024
    Inventors: Mohammad SAGHAYEZHIAN, Binyamin RUBIN, Kirill GUTSOL
  • MAGNETIC SWITCHING MATERIALS AND PREPARATION THEREOF
    Publication number: 20190036017
    Abstract: The invention relates to magnetic thin films including a single magnetic layer of La(1-x)SrxMnO3 deposited on a non-magnetic substrate. The invention further relates to devices comprising said magnetic thin films and methods of manufacture.
    Type: Application
    Filed: July 31, 2018
    Publication date: January 31, 2019
    Applicant: Board of Supervisors of Louisiana State University and Agricultural and Mechanical College
    Inventors: Mohammad Saghayezhian, Earl Ward Plummer, Jiandi Zhang