Abstract: A sensing method includes operating a microelectromechanical system (MEMS) microbeam device; measuring structural vibrations of the MEMS microbeam device over time; selecting an operational frequency foperating that is applied to the MEMS microbeam device, where the operational frequency foperating is different from a jump frequency fJump of the MEMS microbeam device, and the MEMS microbeam device is characterized by a frequency response curve that has a linear part and a softening or hardening part, and the operational frequency foperating is selected to be in the linear part; conducting an analysis of the structural vibrations of the MEMS microbeam device based on a linear equation that relates an amplitude of the structural vibrations to a frequency from the linear part; and detecting a frequency difference between the operational frequency foperating and the jump frequency fJump of the MEMS microbeam device based on the linear equation.

Abstract: Embodiments of multi-frequency excitation are described. In various embodiments, a natural frequency of a device may be determined. In turn, a first voltage amplitude and first fixed frequency of a first source of excitation can be selected for the device based on the natural frequency. Additionally, a second voltage amplitude of a second source of excitation can be selected for the device, and the first and second sources of excitation can be applied to the device. After applying the first and second sources of excitation, a frequency of the second source of excitation can be swept. Using the methods of multi-frequency excitation described herein, new operating frequencies, operating frequency ranges, resonance frequencies, resonance frequency ranges, and/or resonance responses can be achieved for devices and systems.

Abstract: A sensor, having a resonant frequency responsive to presence of an analyze, comprising a DC electrostatic excitation component, to produce a static force pulling a moveable element toward a backplate; an AC electrostatic excitation component, to produce an oscillation in the moveable element with respect to the backplate; and a sensor to detect contact between the moveable and the backplate.

Abstract: A sensor, having a resonant frequency responsive to presence of an analyze, comprising a DC electrostatic excitation component, to produce a static force pulling a moveable element toward a backplate; an AC electrostatic excitation component, to produce an oscillation in the moveable element with respect to the backplate; and a sensor to detect contact between the moveable and the backplate.