Abstract: A flow sensor assembly that may include features that help prevent moisture from reaching a sensor die of the flow sensor assembly. In some cases, such features may include a bypass channel that is configured to reverse the direction of the flow of fluid at least once upstream of the sensor die. In some cases, an encapsulant may cover one or more bond pads of the sensor die. In some cases, an output of the flow sensor assembly may be a raw sensor output signal produced by the one or more sensor elements of the sensor die, without significant processing of the raw sensor signal.

Abstract: A force sensor system includes a substrate, a cover, a sensor, and a spherical force transfer element. The cover is coupled to the substrate, and has an inner surface, an outer surface, an opening extending between the inner and outer surfaces, and a wall structure extending from the inner surface that defines a sensor cavity between the inner surface and the substrate. The sensor is mounted on the substrate, is disposed within the sensor cavity, and is configured to generate a sensor signal representative of a force supplied to the sensor. The spherical force transfer element is disposed partially within the sensor cavity, is movable relative to the cover, extends from the opening in the cover, and engages the sensor. The spherical force transfer element is adapted to receive an input force and is configured, upon receipt of the input force, to transfer the input force to the sensor.

Abstract: A force sensor system includes a substrate, a cover, a sensor, and a spherical force transfer element. The cover is coupled to the substrate, and has an inner surface, an outer surface, an opening extending between the inner and outer surfaces, and a wall structure extending from the inner surface that defines a sensor cavity between the inner surface and the substrate. The sensor is mounted on the substrate, is disposed within the sensor cavity, and is configured to generate a sensor signal representative of a force supplied to the sensor. The spherical force transfer element is disposed partially within the sensor cavity, is movable relative to the cover, extends from the opening in the cover, and engages the sensor. The spherical force transfer element is adapted to receive an input force and is configured, upon receipt of the input force, to transfer the input force to the sensor.

Abstract: This disclosure relates generally to flow sensors, and more particularly, to flow sensors that include a pressure related output signal. In one example, a flow sensor assembly may include a housing with an inlet flow port, an outlet flow port and a fluid channel extending therebetween, with a flow sensing element positioned in the housing and exposed to the fluid channel. A filter insert may be situated in the fluid channel, sometimes upstream of the flow sensor. When so configured, the flow sensor assembly may output a pressure or differential pressure based, at least in part, on a value of the flow rate through the fluid channel as sensed by the flow sensor.

Abstract: A MEMS airflow sensor die having a heater control circuit, differential instrumentation amplifier, temperature compensation, and/or offset correction circuitry integrated with an airflow sensor on the MEMS die. The added circuitry may be placed on space available on the basic airflow die with MEMS fabrication techniques without enlarging the sensor die. The die with the added circuitry may result in a device having a reduced form factor, improved reliability and lower cost.

Abstract: A MEMS airflow sensor die having a heater control circuit, differential instrumentation amplifier, temperature compensation, and/or offset correction circuitry integrated with an airflow sensor on the MEMS die. The added circuitry may be placed on space available on the basic airflow die with MEMS fabrication techniques without enlarging the sensor die. The die with the added circuitry may result in a device having a reduced form factor, improved reliability and lower cost.

Abstract: This disclosure relates generally to flow sensors, and more particularly, to flow sensors that include a pressure related output signal. In one example, a flow sensor assembly may include a housing with an inlet flow port, an outlet flow port and a fluid channel extending therebetween, with a flow sensing element positioned in the housing and exposed to the fluid channel. A filter insert may be situated in the fluid channel, sometimes upstream of the flow sensor. When so configured, the flow sensor assembly may output a pressure or differential pressure based, at least in part, on a value of the flow rate through the fluid channel as sensed by the flow sensor.