Patents by Inventor Mohan Babu Ramisetty

Mohan Babu Ramisetty has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma-resistant Aluminum Oxynitride Based Reactor Components for Semi-Conductor Manufacturing and Processing Equipment
    Publication number: 20160314939
    Abstract: An aluminum oxynitride-based plasma reactor for processing of semiconductor substrates is provided. A method for making an aluminum oxynitride reactor components is also provided. A method for processing a semiconductor substrate in an aluminum oxynitride based plasma reactor is also provided.
    Type: Application
    Filed: April 24, 2016
    Publication date: October 27, 2016
    Inventors: Suri A Sastri, Mohan babu Ramisetty
  • Transparent polycrystalline ceramic material
    Patent number: 9422196
    Abstract: A high performance transparent polycrystalline ceramic material is provided. The transparent polycrystalline ceramic material has a nitrogen-containing isotropic lattice structure and having 80% optical transmission at a wavelength between 3.86 and 4.30 microns through said material at 11 mm of thickness.
    Type: Grant
    Filed: January 10, 2014
    Date of Patent: August 23, 2016
    Assignee: SURMET CORPORATION
    Inventors: Suri A Sastri, Mohan babu Ramisetty
  • Transparent Polycrystalline Ceramic Material
    Publication number: 20140364299
    Abstract: A high performance transparent polycrystalline ceramic material is provided. The transparent polycrystalline ceramic material has a nitrogen-containing isotropic lattice structure and having 80% optical transmission at a wavelength between 3.86 and 4.30 microns through said material at 11 mm of thickness.
    Type: Application
    Filed: January 10, 2014
    Publication date: December 11, 2014
    Applicant: Surmet Corporation
    Inventors: Suri A. Sastri, Mohan Babu Ramisetty