Patents by Inventor Mohd Faizal Zainal Abidin

Mohd Faizal Zainal Abidin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fabrication of local interconnect lines
    Patent number: 7208363
    Abstract: A method of fabricating local interconnect lines (LILs) of a CMOS structures, the method comprising etching an inter layer dielectric (ILD) material of the CMOS structure at a first temperature to form one or more holes and one or more slits; and etching an etch-stop material of the CMOS structure at a second temperature lower than the first temperature to extend the holes and slits to devices of the CMOS structure.
    Type: Grant
    Filed: May 5, 2005
    Date of Patent: April 24, 2007
    Assignee: Systems on Silicon Manufacturing Co. Pte. Ltd.
    Inventors: Stephane Dufrenne, Mohd Faizal Zainal Abidin