Abstract: A sensor for sensing a target substance in an analyte includes a sensing device. The sensing device includes: a substrate that defines a cavity therethrough that receives the analyte; a membrane that is affixed to the substrate to isolate the top side of the sensor from the cavity; an actuator that causes the membrane to vibrate; a functionalizing material applied to the bottom side of the membrane and that has a property such that the membrane resonates at a second frequency when it comes in contact with the target substance; and a detector that indicates when the membrane is resonating a frequency characteristic of the presence of the target substance. An electronic circuit generates an output indicative of whether the target substance is present in the analyte based on the signal from the resonant frequency detector and is isolated from the analyte.

Abstract: A piezoelectric resonator device can be formed to include a piezoelectric film including an active area configured to provide a thickness excited mode of vibration, a first electrode on a first surface of the piezoelectric film positioned to electromechanically couple to the active area, a second electrode on a second surface of the piezoelectric film, opposite the first surface, the second electrode positioned to electromechanically couple to the active area, an energy confinement frame extending on the piezoelectric film embedded in the first or second electrode, an inner side wall of the energy confinement frame facing toward the active area and extending around the active area to define a perimeter that separates the active area located inside the perimeter from an outer area located outside the perimeter adjacent to the active area, an outer side wall of the energy confinement frame facing toward the outer area and aligned to an outer side wall of the first or second electrode and a conformal low-impedan

Abstract: Embodiments of the present disclosure can include a method of operating a vibratory gyroscope, the gyroscope comprising a plurality of excitation and readout electrodes, and defined by a first vibratory mode and a second vibratory mode, and the method comprising: introducing an input signal to a first pair of excitation electrodes; multiplying the input signal by scaling coefficients; applying these scaled input signals to a first pair of excitation electrodes; measuring output signals at the first and second pair of readout electrodes that correspond to the first and second vibratory modes respectively; multiplying the output signals by readout scaling coefficients to form scaled output signals, the sums of which provide first and second vibratory mode readout signals; and adjusting the scaling coefficients to maximize the first and minimize the second vibratory mode readout signals.

Abstract: Embodiments of the present disclosure can include a method of operating a vibratory gyroscope, the gyroscope comprising a plurality of excitation and readout electrodes, and defined by a first vibratory mode and a second vibratory mode, and the method comprising: introducing an input signal to a first pair of excitation electrodes; multiplying the input signal by scaling coefficients; applying these scaled input signals to a first pair of excitation electrodes; measuring output signals at the first and second pair of readout electrodes that correspond to the first and second vibratory modes respectively; multiplying the output signals by readout scaling coefficients to form scaled output signals, the sums of which provide first and second vibratory mode readout signals; and adjusting the scaling coefficients to maximize the first and minimize the second vibratory mode readout signals.

Abstract: Certain implementations of the disclosed technology may include systems and methods for high-frequency resonant gyroscopes. In an example implementation, a resonator gyroscope assembly is provided. The resonator gyroscope assembly can include a square resonator body suspended adjacent to a substrate, a ground electrode attached to a side of the resonator body, a piezoelectric layer attached to a side of the ground electrode, a drive electrode in electrical communication with the piezoelectric layer, and configured to stimulate one or more vibration modes of the square resonator body; and a sense electrode in electrical communication with the piezoelectric layer, and configured to receive an output from the square or disk resonator responsive to stimulation of the one or more vibration modes.

Abstract: Certain implementations of the disclosed technology may include systems and methods for high-frequency resonant gyroscopes. In an example implementation, a resonator gyroscope assembly is provided. The resonator gyroscope assembly can include a square resonator body suspended adjacent to a substrate, a ground electrode attached to a side of the resonator body, a piezoelectric layer attached to a side of the ground electrode, a drive electrode in electrical communication with the piezoelectric layer, and configured to stimulate one or more vibration modes of the square resonator body; and a sense electrode in electrical communication with the piezoelectric layer, and configured to receive an output from the square or disk resonator responsive to stimulation of the one or more vibration modes.