Patents by Inventor Monali B. Joshi

Monali B. Joshi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Composite semiconductor substrates for thin-film device layer transfer
    Patent number: 8624357
    Abstract: Described herein are composite semiconductor substrates for use in semiconductor device fabrication and related devices and methods. In one embodiment, a composite substrate includes: (1) a bulk silicon layer; (2) a porous silicon layer adjacent to the bulk silicon layer, wherein the porous silicon layer has a Young's modulus value that is no greater than 110.5 GPa; (3) an epitaxial template layer, wherein the epitaxial template layer has a root-mean-square surface roughness value in the range of 0.2 nm to 1 nm; and (4) a set of silicon nitride layers disposed between the porous silicon layer and the epitaxial template layer.
    Type: Grant
    Filed: August 27, 2009
    Date of Patent: January 7, 2014
    Assignee: The Regents of the University of California
    Inventors: Monali B. Joshi, Mark S. Goorsky
  • Composite Semiconductor Substrates for Thin-Film Device Layer Transfer
    Publication number: 20110221040
    Abstract: Described herein are composite semiconductor substrates for use in semiconductor device fabrication and related devices and methods. In one embodiment, a composite substrate includes: (1) a bulk silicon layer; (2) a porous silicon layer adjacent to the bulk silicon layer, wherein the porous silicon layer has a Young's modulus value that is no greater than 110.5 GPa; (3) an epitaxial template layer, wherein the epitaxial template layer has a root-mean-square surface roughness value in the range of 0.2 nm to 1 nm; and (4) a set of silicon nitride layers disposed between the porous silicon layer and the epitaxial template layer.
    Type: Application
    Filed: August 27, 2009
    Publication date: September 15, 2011
    Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    Inventors: Monali B. Joshi, Mark S. Goorsky