Patents by Inventor Monica J. Barrett

Monica J. Barrett has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pre-alignment marking and inspection to improve mask substrate defect tolerance
    Patent number: 7927766
    Abstract: A method includes determining defect types and defect locations on a mask blank and storing the defect types and the defect locations. The method further includes generating at least one alignment mark on the mask blank and selecting a mask pattern for the mask blank based on the defect types and the defect locations. Additionally, the method includes determining a positioning of the mask pattern on the mask blank, aligning a mask pattern generator with the mask blank in accordance with the positioning using the at least one alignment mark and forming the mask pattern on the mask blank using the mask pattern generator.
    Type: Grant
    Filed: March 3, 2008
    Date of Patent: April 19, 2011
    Assignee: International Business Machines Corporation
    Inventors: Monica J. Barrett, Kevin W. Collins, Daniel B. Sullivan
  • PRE-ALIGNMENT MARKING AND INSPECTION TO IMPROVE MASK SUBSTRATE DEFECT TOLERANCE
    Publication number: 20090220866
    Abstract: A method includes determining defect types and defect locations on a mask blank and storing the defect types and the defect locations on the mask blank. The method further includes generating at least one alignment mark on the mask blank and selecting a mask pattern for the mask blank based on the defect types and the defect locations. Additionally, the method includes determining a positioning of the mask pattern on the mask blank, aligning a mask pattern generator with the mask blank in accordance with the positioning using the at least one alignment mark and forming the mask pattern in the mask blank using the mask pattern generator.
    Type: Application
    Filed: March 3, 2008
    Publication date: September 3, 2009
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Monica J. BARRETT, Kevin W. Collins, Daniel B. Sullivan