Patents by Inventor Monika Frey

Monika Frey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8253947
    Abstract: A device for measuring lithography masks is provided, comprising a reticle carrier for the lithography mask to be measured, a measurement objective for reproducing on a detector a section of said lithography mask held by said reticle carrier, a measurement module for measuring the position of said reticle carrier relative to said measurement objective, and a correction module by means of which said reticle carrier can be moved in order to bring it into a predetermined position relative to said measurement objective, wherein said measurement objective and said measurement module are fastened directly to an instrument carrier in a locally fixed manner.
    Type: Grant
    Filed: November 6, 2007
    Date of Patent: August 28, 2012
    Assignee: Carl Zeiss SMS GmbH
    Inventors: Albrecht Hof, Günter Maul, Dietmar Neugebauer, Armin Bich, Monika Frey, Wolfgang Scherm, Stefan Otto, Rainer Maul, Helmut Krause
  • Publication number: 20110205549
    Abstract: A device for measuring lithography masks is provided, comprising a reticle carrier for the lithography mask to be measured, a measurement objective for reproducing on a detector a section of said lithography mask held by said reticle carrier, a measurement module for measuring the position of said reticle carrier relative to said measurement objective, and a correction module by means of which said reticle carrier can be moved in order to bring it into a predetermined position relative to said measurement objective, wherein said measurement objective and said measurement module are fastened directly to an instrument carrier in a locally fixed manner.
    Type: Application
    Filed: November 6, 2007
    Publication date: August 25, 2011
    Inventors: Albrecht Hof, Günter Maul, Dietmar Neugebauer, Armin Bich, Monika Frey, Wolfgang Scherm, Stefan Otto, Rainer Maul, Helmut Krause
  • Patent number: 6331660
    Abstract: The identification of the maize Bx1 gene involved in benzoxazinone biosynthesis activity is described. This Bx1 gene, as well as other benzoxazinone biosynthesis genes, provide valuable tools for the production of plants with enhanced expression profiles of bezoxazinone synthesis, and therefore, resistance to insect infestation.
    Type: Grant
    Filed: March 13, 1998
    Date of Patent: December 18, 2001
    Assignee: Dekalb Genetics Corporation
    Inventors: Paul S. Chomet, Monika Frey, Alfons Gierl