Patents by Inventor Monika Lorkowski

Monika Lorkowski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of planarizing trench structures
    Patent number: 5456797
    Abstract: A method of planarizing trench-like structures, particularly on semiconductor substrates, by filling in the trench-like structures. For this purpose, a pre-polymer is selectively filled into the trench-like structures, is hardened and is then expanded.
    Type: Grant
    Filed: January 14, 1994
    Date of Patent: October 10, 1995
    Assignee: Robert Bosch GmbH
    Inventors: Lothar Weber, Monika Lorkowski, Klaus-Michael Mayer