Patents by Inventor Monisha Sharma

Monisha Sharma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Waterproof mems pressure sensor package with a metal lid and an embedded ePTFE filter and process of making
    Patent number: 12428292
    Abstract: Microelectromechanical system (MEMS) packages and methods of making thereof. A MEMS package includes at least one MEMS device disposed on a base substrate and a lid disposed on the base substrate. The lid is configured to enclose the at least one MEMS device. The lid includes a body portion configured to be coupled to the base substrate, a ceiling portion and a membrane. The ceiling portion, the body portion and the ceiling portion form a cavity in which the at least one MEMS device is enclosed. The membrane is configured to be in contact with the ceiling portion. The membrane is formed from a filtering fabric and is configured to substantially block one or more of liquids and contaminants from passing into the cavity.
    Type: Grant
    Filed: April 29, 2022
    Date of Patent: September 30, 2025
    Assignee: InvenSense, Inc.
    Inventors: Roberto Brioschi, Vijay Wakharkar, Monisha Sharma
  • Waterproof MEMS Pressure Sensor Package With A Metal Lid And An Embedded ePTFE Filter And Process Of Making
    Publication number: 20230087021
    Abstract: Microelectromechanical system (MEMS) packages and methods of making thereof. A MEMS package includes at least one MEMS device disposed on a base substrate and a lid disposed on the base substrate. The lid is configured to enclose the at least one MEMS device. The lid includes a body portion configured to be coupled to the base substrate, a ceiling portion and a membrane. The ceiling portion, the body portion and the ceiling portion form a cavity in which the at least one MEMS device is enclosed. The membrane is configured to be in contact with the ceiling portion. The membrane is formed from a filtering fabric and is configured to substantially block one or more of liquids and contaminants from passing into the cavity.
    Type: Application
    Filed: April 29, 2022
    Publication date: March 23, 2023
    Inventors: Roberto Brioschi, Vijay Wakharkar, Monisha Sharma