Abstract: A semiconductor manufacturing apparatus according to an embodiment of the present invention comprises: an ultraviolet generating part which is disposed in an ultraviolet generating chamber and generates ultraviolet rays of a target wavelength; a substrate driving part including a chuck which is disposed in a process chamber where a substrate fed therein is treated with ultraviolet rays and supports the fed substrate, and an axis which rotates and moves up and down the chuck; and a window which is disposed between the ultraviolet generating chamber and the process chamber and transmits the generated ultraviolet rays to the process chamber.

Abstract: A plasma generating device includes: a supply module for supplying gas; a handset for generating plasma from the supplied gas; and a control module attachable to or detachable from the supply module, wherein the plasma generating device switches to a button control mode or a dial control mode depending on the manner in which the handset is connected to the control module and the supply module.

Abstract: Disclosed is a plasma device which includes: a base including a power supply unit configured to receive electric power and form an AC signal, a gas flow rate adjustment unit configured to receive gas and control a flow rate of output gas, an input unit configured to receive an input of a user, and a controller configured to control the power supply unit and the gas flow rate adjustment unit according to the input; and a handpiece including a boosting transformer configured to boost the AC signal, an electrode structure configured to receive the boosted AC signal and the gas and form plasma, a switch configured to receive a plasma discharge signal of the user, and a nozzle configured to discharge the formed plasma, wherein the handpiece is connected to the base via a connector and is exchangeable.

Abstract: A secondary bobbin of a high-voltage transformer and a portable plasma device including the same are provided to regulate discharge voltage. The secondary bobbin of the high-voltage transformer includes: a main body; barrier portions dividing the main body into a predetermined number of multiple segments along the length of the main body; winding portions where a coil is wound on the multiple segments into which the main body is divided; and switch circuit portions connecting neighboring barrier portions by a switch, wherein the switch circuit portions electrically connect or disconnect the winding portions to adjust the number of turns depending on whether the switch circuit portions are on or off.

Abstract: An inductively coupled plasma generating apparatus includes: a radio frequency (RF) generator; an impedance matcher connected to the RF generator; a gas supplier; and a first plasma head connected to the impedance matcher and the gas supplier to receive power and gas, that comprises a dielectric tube and a first antenna, wherein the first antenna is attached to the dielectric tube by being spirally wound along the length of the dielectric tube, and plasma is generated in the dielectric tube by a magnetic field created by the first antenna.

Abstract: The present disclosure relates to a portable plasma device which is convenient to carry and has excellent performance and is capable of simply, uniformly, and locally treating an inner surface of a microstructure such as a microwell plate by easily adjusting a plasma flame.

Abstract: A plasma generating device includes: a supply module for supplying gas; a handset for generating plasma from the supplied gas; and a control module attachable to or detachable from the supply module, wherein the plasma generating device switches to a button control mode or a dial control mode depending on the manner in which the handset is connected to the control module and the supply module.

Abstract: Disclosed is a plasma device which includes: a base including a power supply unit configured to receive electric power and form an AC signal, a gas flow rate adjustment unit configured to receive gas and control a flow rate of output gas, an input unit configured to receive an input of a user, and a controller configured to control the power supply unit and the gas flow rate adjustment unit according to the input; and a handpiece including a boosting transformer configured to boost the AC signal, an electrode structure configured to receive the boosted AC signal and the gas and form plasma, a switch configured to receive a plasma discharge signal of the user, and a nozzle configured to discharge the formed plasma, wherein the handpiece is connected to the base via a connector and is exchangeable.

Abstract: The present disclosure relates to a portable plasma device which is convenient to carry and has excellent performance and is capable of simply, uniformly, and locally treating an inner surface of a microstructure such as a microwell plate by easily adjusting a plasma flame.

Abstract: The present invention relates to a foam-shaped graphene structure and, more particularly, to a method for producing a foam-shaped graphene structure by boiling, and to a foam-shaped graphene structure using same. Provided is a method for producing a foam-shaped graphene structure by boiling, which includes the steps of: preparing a base substrate (S1); placing the base substrate in a reduced graphene oxide (RGO) colloid solution (S2); applying a heat flux to the base substrate using an exothermic body so as to cause boiling (S3); and generating the foam-shaped graphene structure on the base substrate as bubbles generated by the boiling become overlapped (S4).

Abstract: A sodium-nanoliquid reactivity experiment apparatus includes: a storage tank that stores liquid sodium; a mixing tank that is connected to the storage tank through a first transport line to receive supply of the liquid sodium and that injects nanoparticles to mix the nanoparticles with the liquid sodium; and a reactor that is connected to the mixing tank through a second transport line to receive supply of a sodium-nanoparticle mixture and that injects water to react the water with the sodium-nanoparticle mixture.

Abstract: The present invention relates to a foam-shaped graphene structure and, more particularly, to a method for producing a foam-shaped graphene structure by boiling, and to a foam-shaped graphene structure using same. Provided is a method for producing a foam-shaped graphene structure by boiling, which includes the steps of: preparing a base substrate (S1); placing the base substrate in a reduced graphene oxide (RGO) colloid solution (S2); applying a heat flux to the base substrate using an exothermic body so as to cause boiling (S3); and generating the foam-shaped graphene structure on the base substrate as bubbles generated by the boiling become overlapped (S4).

Abstract: A sodium-nanoliquid reactivity experiment apparatus includes: a storage tank that stores liquid sodium; a mixing tank that is connected to the storage tank through a first transport line to receive supply of the liquid sodium and that injects nanoparticles to mix the nanoparticles with the liquid sodium; and a reactor that is connected to the mixing tank through a second transport line to receive supply of a sodium-nanoparticle mixture and that injects water to react the water with the sodium-nanoparticle mixture.

Abstract: Provided is an apparatus for anodizing an internal surface of a tube including an electrolyte container storing an electrolyte solution, a first solution conduit connected with the electrolyte container to receive the electrolyte solution, a first jig configured to fix one end of a targeted tube to a downstream end of the first solution conduit, a second solution conduit in which the other end of the targeted tube is connected to an upstream end to discharge the electrolyte solution flowing into the targeted tube, a second jig configured to fix the other end of the targeted tube to an upstream end of the second solution conduit, and a cathode rod inserted from the second jig and extended to the first jig through the inner portion of the targeted tube, in which, while the electrolyte solution passes through the inner portion of the targeted tube, a cathode is applied to the cathode rod and an anode is applied to the targeted tube to perform an anodizing process.

Abstract: A method for forming roughness on an outer surface of cladding of a fuel nuclear rod including zirconium includes: positioning the cladding of the nuclear fuel rod at a first electrode and connecting a positive electrode thereto, and positioning a conductive plate at a second electrode and connecting a negative electrode thereto; putting the cladding of the nuclear fuel rod in an electrolyte solution; and applying voltage to the positive electrode and the negative electrode to cause oxidation on the outer surface of the cladding of the nuclear fuel rod. In this case, the electrolyte solution is maintained at 10° C. or lower.

Abstract: Disclosed is a heat exchanger. The heat exchanger includes a plurality of plates superimposed on one another, and a plurality of heat transfer fins formed on the plurality of plates, and shaped into an airfoil, wherein a channel of a fluid between the superimposed plates is formed to perform a heat exchange.

Abstract: The present invention relates to hybrid absorption chiller, which uses high-temperature steam and medium-temperature water generated in industrial processes as a heat source, the hybrid absorption chiller including a high temperature generator that uses the high-temperature steam as a heat source so that the heat exchange with refrigerant is carried out; a low temperature generator that uses the heat of condensation of the refrigerant steam, generated in the high temperature generator, as a heat source so that the heat exchange with refrigerant is once again carried out; a generator for medium temperature water that uses the medium-temperature water as a heat source so that the heat exchange with refrigerant is carried out; a hybrid condenser that simultaneously condenses the refrigerants which are respectively heat-exchanged in the high temperature generator, the low temperature generator, and the generator for medium temperature water; an evaporator that uses latent heat of vaporization of the refrigerant c

Abstract: An apparatus for measuring heat dissipation of a target heating element includes a reference heating element for emitting heat; a control unit; and a pair of temperature measuring devices for measuring representative temperatures of the target and the reference heating element and transmitting to the control unit signals indicating the representative temperatures. The reference heating element has an outer configuration and sizes substantially identical to those of the target heating element. The control unit controls the reference heating element such that the representative temperature of the reference heating element becomes substantially identical to that of the target heating element.

Abstract: A fin tube heat exchanger includes plate-shaped elongated fin members spaced at regular intervals, in parallel with one another. Each fin member has a fin base, through-holes in two rows in a longitudinal direction of the fin member, and raised portions with legs. Heat exchanger tubes are inserted into the through-holes. Each fin member has flat areas at a front and middle regions of a front half and a middle region of a rear half. The raised portion disposed at a rear region of the front half and a front region of the rear half has the legs inclined by a predetermined angle with respect to a traverse centerline which passes through the center of an adjacent through-hole of the front row. The distance from the centerline generally increases with a direction of airflow. A larger volume of air can be directed toward the vicinity of the tubes of the rear row. Each fin member has a front edge and a rear edge.