Patents by Inventor Moon Gi Lim

Moon Gi Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Composite dry vacuum pump having roots rotor and screw rotor
    Patent number: 7722332
    Abstract: Disclosed is a dry vacuum pump for evacuating a processing chamber in a semiconductor or display manufacturing device, or for evacuating gaseous substance and/or byproducts generated in the process chamber. The dry vacuum pump does not need a partition wall between the roots rotor and the screw rotor. A space is formed at the under sides of the roots rotor and the screw rotor to contain the object substance therein.
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: May 25, 2010
    Assignee: LOT Vacuum Co., Ltd.
    Inventor: Moon Gi Lim