Patents by Inventor Moon-Hwoi Kim

Moon-Hwoi Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030087166
    Abstract: Disclosed is a method for manufacturing a semiconductor device, wherein a reticle that can expose only a portion where the pattern is changed on an edge area of a wafer is manufactured, and then a double exposure process is performed by using the reticle, whereby all of the photoresist on the part where the pattern is changed is removed. There are advantages that the yield of the semiconductor device is enhanced, and the electrical properties thereof are improved.
    Type: Application
    Filed: November 7, 2002
    Publication date: May 8, 2003
    Applicant: HYNIX SEMICONDUCTOR INC.
    Inventors: Sang-Tae Choi, Moon-Hwoi Kim, Kwang-Chul Kim