Patents by Inventor Moon Soon Choi

Moon Soon Choi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250016888
    Abstract: An apparatus for processing a substrate includes a liquid supply line; a pressure tank configured to store liquid; a circulation line including a first heating unit configured to heat liquid, wherein liquid heated by the first heating unit circulates in the pressure tank in a liquid supply standby state, which is before liquid is supplied to the substrate in a process chamber; a pressured gas supply line configured to supply pressured gas to the pressure tank in the liquid supply standby state and to pressurize gas; an exhaust line configured to exhaust gas in the pressure tank; and a control unit configured to control pressure in the pressure tank to increase to a predetermined pressure by opening the pressured gas supply line in a state in which the pressure tank is closed before liquid circulates in the pressure tank in the liquid supply standby state.
    Type: Application
    Filed: May 10, 2024
    Publication date: January 9, 2025
    Inventors: Chae Young LIM, Moon Soon CHOI
  • Publication number: 20230194422
    Abstract: A chemical liquid supply unit includes a chemical liquid storage storing a chemical liquid, a chemical liquid supply line that is connected to the chemical liquid storage, the chemical liquid flowing through the chemical liquid supply line from the chemical liquid storage, and a chemical liquid inspection means detecting impurities from the chemical liquid flowing through the chemical liquid supply line using a spectroscopy method.
    Type: Application
    Filed: December 13, 2022
    Publication date: June 22, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Seung Tae YANG, Sang Woo PARK, Young Joon HAN, Gi Hun CHOI, Moon Soon CHOI, Seong Hyeon KIM, Bu Young JUNG
  • Publication number: 20230184574
    Abstract: Provided is an apparatus for supplying a chemical liquid, the apparatus including: a storage tank in which a chemical liquid is stored; a discharge line through which the chemical liquid stored in the storage tank is discharged; a level tube connected to the storage tank so as to check a water level of the chemical liquid in the storage tank and receiving the chemical liquid at the same water level as the water level of the chemical liquid in the storage tank; and a controller for controlling a first valve installed in the discharge line, in which the level tube has one end connected to an upper space of the storage tank and the other end connected to the discharge line.
    Type: Application
    Filed: December 9, 2022
    Publication date: June 15, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Tae Suk YUN, Sang Woo Park, Do Gyeong Ha, Seung Tae Yang, Bu Young Jung, Moon Soon Choi, Chae Young Lim
  • Publication number: 20230173438
    Abstract: An apparatus for processing a substrate includes a mixing nozzle having a mixing space that is shaped as an inverted cone, the mixing nozzle including a first inlet, a second inlet and an outlet installed at the mixing space; a first chemical supply unit connected to the first inlet; a second chemical supply unit connected to the second inlet; and a supply tank connected to the outlet, wherein the first chemical supply unit is configured to supply a first chemical solution to the mixing space through the first inlet, the second chemical supply unit is configured to supply a second chemical solution to the mixing space through the second inlet, and the supply tank is supplied with, through the outlet, a solution mixture that is formed of the first chemical solution and the second chemical solution after being mixed in the mixing space.
    Type: Application
    Filed: September 26, 2022
    Publication date: June 8, 2023
    Inventors: Gu Yeol AN, Do Gyeong HA, Moon Soon CHOI, Bu Young JUNG, Kyung Hun LEE, Chae Young LIM
  • Publication number: 20230131576
    Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a support unit configured to support a substrate; and a liquid supply unit configured to supply a treating liquid onto the substrate supported on the support unit, and wherein the liquid supply unit comprises: a tank configured to have an accommodation space for storing the treating liquid therein; a circulation line configured to circulate the treating liquid stored in the accommodation space; a supplementary line configured to supply the treating liquid to the accommodation space, and at which a valve is installed; a heater installed at the circulation line, and for heating the treating liquid; and a controller is configured to control the valve and the heater.
    Type: Application
    Filed: October 19, 2022
    Publication date: April 27, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Do Gyeong HA, Tae Suk YUN, Moon Soon CHOI, Gu Yeol AN, Chae Young LIM, Bu Young JUNG
  • Publication number: 20230089188
    Abstract: The inventive concept provides a liquid storage unit. The liquid storage unit includes a tank housing defining a storing space therein; a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and wherein a first guide surface is provided between the outlet and the inlet.
    Type: Application
    Filed: September 9, 2022
    Publication date: March 23, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Moon Soon CHOI, Chae Young LIM, Do Gyeong HA, Gu Yeol AN
  • Publication number: 20220297169
    Abstract: Provided are a treating liquid providing unit capable of predicting a temperature change of a substrate treating liquid by adding an inflow amount or consumption amount of the substrate treating liquid as a control factor, and a substrate treating apparatus including the same. The treating liquid providing unit includes a treating liquid storage module for storing the substrate treating liquid, a treating liquid heating module for heating the substrate treating liquid, a treating liquid discharging module for discharging the substrate treating liquid, a treating liquid supplying module for supplying the substrate treating liquid to the treating liquid storage module when the substrate treating liquid is discharged, and a control module for predicting the temperature of the substrate treating liquid remaining in the treating liquid storage module based on the inflow amount of the substrate treating liquid.
    Type: Application
    Filed: March 15, 2022
    Publication date: September 22, 2022
    Inventors: Gun Min Lee, Do Gyeong Ha, Moon Soon Choi, Chae Young Lim, Jae Hyeok Yu
  • Patent number: 11433438
    Abstract: The inventive concept relates to a dissolved ozone removal unit, a substrate treating apparatus including the same, and a substrate treating method. The dissolved ozone removal unit includes a fluid channel providing member having a fluid channel through which a processing liquid passes and a light source member that is mounted in the fluid channel providing member and that supplies UV light to the processing liquid, and the fluid channel providing member includes a helical fluid channel configured such that the processing liquid is exposed to the UV light while helically moving around the light source member.
    Type: Grant
    Filed: December 17, 2019
    Date of Patent: September 6, 2022
    Assignee: SEMES CO., LTD.
    Inventor: Moon Soon Choi
  • Publication number: 20200188968
    Abstract: The inventive concept relates to a dissolved ozone removal unit, a substrate treating apparatus including the same, and a substrate treating method. The dissolved ozone removal unit includes a fluid channel providing member having a fluid channel through which a processing liquid passes and a light source member that is mounted in the fluid channel providing member and that supplies UV light to the processing liquid, and the fluid channel providing member includes a helical fluid channel configured such that the processing liquid is exposed to the UV light while helically moving around the light source member.
    Type: Application
    Filed: December 17, 2019
    Publication date: June 18, 2020
    Inventor: Moon Soon CHOI
  • Publication number: 20170268502
    Abstract: A pump is disclosed which includes a pump body, a silencer connected to the pump body, and a condensation preventing device surrounding the silencer. A liquid supplying apparatus is also disclosed which includes the pump for providing a power to supply the liquid to outside, and a storage tank for storing a liquid.
    Type: Application
    Filed: March 13, 2017
    Publication date: September 21, 2017
    Inventors: Moon Soon Choi, Seok Gyu Kim, Youngju Jeong