Patents by Inventor Mor Azarya

Mor Azarya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for monitoring parameters of a semiconductor factory automation system
    Patent number: 12666931
    Abstract: A system for monitoring one or more conditions of an automation system of a semiconductor factory includes one or more instrumented substrates, one or more sealable containers and one or more system servers. The one or more instrumented substrates include one or more sensors. The one or more sensors measure one or more conditions of the one or more instrumented substrates as the one or more sealable containers transport the one or more instrumented substrates through the semiconductor factory. The one or more sealable containers also receive sensor data from the one or more sensors included on the one or more instrumented substrates. The one or more system servers are configured to receive the sensor data from the one or more sealable containers. The one or more servers are configured to identify one or more deviations in the measured one or more conditions.
    Type: Grant
    Filed: December 22, 2022
    Date of Patent: June 23, 2026
    Assignee: KLA Corporation
    Inventors: Mor Azarya, Michael D. Brain, Ami Appelbaum, Shai Mark, Arie Hoffman
  • ULTRASONIC DETECTION OF VOIDS AND CRACKS IN SUBSTRATES
    Publication number: 20250116632
    Abstract: A method of ultrasonic detection of voids and cracks in substrates includes controlling an ultrasonic transducer to generate an acoustic signal applied to the substrate, receiving a reflected acoustic signal detected by an ultrasonic detector, and determining a defect in the substrate based on phase and intensity of the reflected acoustic signal compared to the acoustic signal applied to the substrate.
    Type: Application
    Filed: May 31, 2024
    Publication date: April 10, 2025
    Inventors: Yuri Paskover, Tal Goichman, Mor Azarya, Itay Peled
  • SYSTEM AND METHOD FOR MONITORING PARAMETERS OF A SEMICONDUCTOR FACTORY AUTOMATION SYSTEM
    Publication number: 20230119169
    Abstract: A system for monitoring one or more conditions of an automation system of a semiconductor factory includes one or more instrumented substrates, one or more sealable containers and one or more system servers. The one or more instrumented substrates include one or more sensors. The one or more sensors measure one or more conditions of the one or more instrumented substrates as the one or more sealable containers transport the one or more instrumented substrates through the semiconductor factory. The one or more sealable containers also receive sensor data from the one or more sensors included on the one or more instrumented substrates. The one or more system servers are configured to receive the sensor data from the one or more sealable containers. The one or more servers are configured to identify one or more deviations in the measured one or more conditions.
    Type: Application
    Filed: December 22, 2022
    Publication date: April 20, 2023
    Inventors: Mor Azarya, Michael D. Brain, Ami Appelbaum, Shai Mark, Arie Hoffman
  • System and method for monitoring parameters of a semiconductor factory automation system
    Patent number: 11569138
    Abstract: A system for monitoring one or more conditions of an automation system of a semiconductor factory includes one or more instrumented substrates, one or more sealable containers and one or more system servers. The one or more instrumented substrates include one or more sensors. The one or more sensors measure one or more conditions of the one or more instrumented substrates as the one or more sealable containers transport the one or more instrumented substrates through the semiconductor factory. The one or more sealable containers also receive sensor data from the one or more sensors included on the one or more instrumented substrates. The one or more system servers are configured to receive the sensor data from the one or more sealable containers. The one or more servers are configured to identify one or more deviations in the measured one or more conditions.
    Type: Grant
    Filed: February 19, 2016
    Date of Patent: January 31, 2023
    Assignee: KLA Corporation
    Inventors: Mor Azarya, Michael D. Brain, Ami Appelbaum, Shai Mark, Arie Hoffman
  • System and Method for Monitoring Parameters of a Semiconductor Factory Automation System
    Publication number: 20160370797
    Abstract: A system for monitoring one or more conditions of an automation system of a semiconductor factory includes one or more instrumented substrates, one or more sealable containers and one or more system servers. The one or more instrumented substrates include one or more sensors. The one or more sensors measure one or more conditions of the one or more instrumented substrates as the one or more sealable containers transport the one or more instrumented substrates through the semiconductor factory. The one or more sealable containers also receive sensor data from the one or more sensors included on the one or more instrumented substrates. The one or more system servers are configured to receive the sensor data from the one or more sealable containers. The one or more servers are configured to identify one or more deviations in the measured one or more conditions.
    Type: Application
    Filed: February 19, 2016
    Publication date: December 22, 2016
    Inventors: Mor Azarya, Michael D. Brain, Ami Appelbaum, Shai Mark, Arie Hoffman