Patents by Inventor Morio Terakado

Morio Terakado has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Structure for attaching a pellicle to a photo-mask
    Patent number: 6795170
    Abstract: A structure for attaching a pellicle to a photomask, the pellicle comprising a pellicle frame and a pellicle sheet attached to an opening portion formed in the pellicle frame, wherein at least a portion of the pellicle frame surface in contact with the photo-mask has a direct contact with the photo-mask without interposing an adhesive.
    Type: Grant
    Filed: November 20, 2002
    Date of Patent: September 21, 2004
    Assignee: Asahi Glass Company, Limited
    Inventors: Hitoshi Mishiro, Shinya Kikugawa, Kaname Okada, Takayuki Kawahara, Morio Terakado
  • Structure for attaching a pellicle to a photo-mask
    Publication number: 20030095245
    Abstract: A structure for attaching a pellicle to a photomask, the pellicle comprising a pellicle frame and a pellicle sheet attached to an opening portion formed in the pellicle frame, wherein at least a portion of the pellicle frame surface in contact with the photo-mask has a direct contact with the photo-mask without interposing an adhesive.
    Type: Application
    Filed: November 20, 2002
    Publication date: May 22, 2003
    Applicant: Asahi Glass Company, Limited
    Inventors: Hitoshi Mishiro, Shinya Kikugawa, Kaname Okada, Takayuki Kawahara, Morio Terakado