Abstract: A flow detector comprises at least two housing parts with a semiconductor chip having an integrated flow sensor arranged between the housing parts. An opening is provided in one of the housing parts and at least one metal pin extends through the opening and forms an electrical lead-through. A hardened filler material is used for sealing the lead-through against the walls of the opening. This construction provides a well sealed cavity for the fluid to be measured and can be manufactured easily.

Abstract: A sensor for determining at least one parameter with a sigma-delta converter (1) comprises switched input capacitors and feedback capacitors (Cf1, Cf2, Crefc1, Crefc2, Creff1, Creff2, Crt1, Crt2, Cr1, Cr2, Ctemp1, Ctemp2, Cs1, Cs2). At least one of the capacitors is designed such that its capacitance depends on the parameter to be determined. In this way, the change of capacitance can be directly determined by means of the sigma-delta converter. Due to a symmetric design of the converter a higher accuracy can be reached.

Abstract: A device for measuring the flow of a fluid has a primary duct and a bypass arranged in series to the primary duct. The bypass has a first section and a second section. A baffle plate with a hole for the passage of the fluid is arranged in the first section. The second section comprises two parallel secondary ducts. In the first section, a turbulent flow dominates, while the flow in the second section is primarily laminar. If the turbulent effects in the bypass are sufficiently strong, the ratio of the flows in the primary duct and the bypass can be substantially independent of the fluid properties and of the flow rate. By using two parallel secondary ducts in the second section, high flow rates and therefore strongly turbulent effects can be achieved without exceeding the measuring range of the sensor.

Abstract: A flow detector comprises at least two housing parts with a semiconductor chip having an integrated flow sensor arranged between the housing parts. An opening is provided in one of the housing parts and at least one metal pin extends through the opening and forms an electrical lead-through. A hardened filler material is used for sealing the lead-through against the walls of the opening. This construction provides a well sealed cavity for the fluid to be measured and can be manufactured easily.

Abstract: A device for measuring the flow of a fluid has a primary duct and a bypass arranged in series to the primary duct. The bypass has a first section and a second section. A baffle plate with a hole for the passage of the fluid is arranged in the first section. The second section comprises two parallel secondary ducts. In the first section, a turbulent flow dominates, while the flow in the second section is primarily laminar. If the turbulent effects in the bypass are sufficiently strong, the ratio of the flows in the primary duct and the bypass can be substantially independent of the fluid properties and of the flow rate. By using two parallel secondary ducts in the second section, high flow rates and therefore strongly turbulent effects can be achieved without exceeding the measuring range of the sensor.

Abstract: For measuring the flow and the thermal conductivity of a fluid, a sensor is used, which has a first temperature detector for measuring a first temperature and a second temperature detector for measuring a second temperature. A heating is arranged between the temperature detectors. Two measured quantities are determined by means of the temperature detectors, a first of which is e.g. a difference between the temperatures and a second one of which is one of the temperatures. By comparing the two measured quantities, the flow and the thermal conductivity of the fluid can be determined.

Abstract: A sensor, in particular a humidity sensor, comprises a measuring layer (4), the dielectric properties of which depend on a parameter to be measured, e.g. of the humidity of the environmental air. Electrodes (2, 3) are arranged on a substrate (1) side by side for capacitively measuring the measuring layer (1). A protective layer (8) of a non-oxidizing material, in particular a layer of silicon oxide or gold, is arranged between the electrodes (2, 3) and the measuring layer (4). This layer prevents an oxidation of the electrodes (2, 3) and increases the live time and reliability of the sensor.

Abstract: A sensor for determining at least one parameter with a sigma-delta converter (1) comprises switched input capacitors and feedback capacitors (Cf1, Cf2, Crefc1, Crefc2, Creff1, Creff2, Crt1, Crt2, Cr1, Cr2, Ctemp1, Ctemp2, Cs1, Cs2). At least one of the capacitors is designed such that its capacitance depends on the parameter to be determined. In this way, the change of capacitance can be directly determined by means of the sigma-delta converter. Due to a symmetric design of the converter a higher accuracy can be reached.