Patents by Inventor Moritz Steinberg

Moritz Steinberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • IC FABRICATION FLOW WITH DYNAMIC SAMPLING FOR MEASUREMENT
    Publication number: 20230366832
    Abstract: A wafer metrology system including a dynamic sampling scheme configured to optimize a sampling rate for measurement of process wafers in an IC fabrication flow based on process capability index data as well as measurement history data. For a stable process, the process wafers may be sampled at a lower rate without negatively affecting quality control.
    Type: Application
    Filed: September 29, 2022
    Publication date: November 16, 2023
    Inventors: Jonas Hoehenberger, Moritz Steinberg, Pietro Foglietti, Alexander Sirch