Patents by Inventor Moriyoshi Hasegawa

Moriyoshi Hasegawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate heat-treating apparatus
    Patent number: 5201653
    Abstract: An apparatus for heat-treating substrates includes a plurality of heat-treating units arranged in vertical stages, and at least one hollow column for supporting the heat-treating units. Each heat-treating unit has an exhaust line communicating with the column to exhaust gases from the heat-treating units through the column by suction.
    Type: Grant
    Filed: September 30, 1991
    Date of Patent: April 13, 1993
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Moriyoshi Hasegawa, Yoshio Matsumura, Yoshiteru Fukutomi