Abstract: An improved charged-particle beam optical apparatus including a specimen holder which is mounted in at least one support member of the apparatus and vibrates when the support member is subjected to shock. The improvement of the invention comprises at least one damped supplemental oscillator coupled to the specimen holder at approximately the point of maximum vibration amplitude of the holder.

Abstract: A scanning, corpuscular-beam microscope which includes a beam deflection system comprising a first stage for deflecting the beam out of the optical axis of the microscope and a second stage, disposed after the first stage along the beam path, for deflecting the beam towards the optical axis of the microscope. A first objective lens having a short focal length is disposed after the second beam deflection stage along the beam path for focusing the beam on a specimen. The improvement of the invention comprises the provision of a second objective lens having a long focal length which is disposed above the first objective lens along the beam path. The second objective lens is excited for low magnification of the specimen by the microscope and redirects the deflected beam in a direction approximately parallel to the microscope axis and focuses the beam on the specimen.

Abstract: A scanning corpuscular-beam transmission-type microscope including an energy analyzer below the specimen and a first deflection system disposed between the beam source and the specimen. A second deflection system is disposed between the specimen and the energy analyzer for redirecting the beam to the input aperture of the energy analyzer and is rotated with respect to the first deflection system to compensate for rotation of the specimen image by the objective lens of the microscope.

Abstract: A corpuscular-beam transmission-type microscope in which image elements are generated simultaneously. The microscope includes a specimen holding stage movable perpendicular to the microscope axis in a pair of transverse adjustment directions, beam deflectors disposed behind the specimen along the beam path for deflecting an image in the microscope in at least one deflection direction, and magnetic lens imaging means disposed between the specimen and the beam deflectors which helically deflects, between the specimen and the beam deflectors, parts of the beam not disposed in the microscope axis and rotates the image of the specimen through an image rotation angle in the microscope.

Abstract: A method of operating a particle-beam apparatus such as an electron microscope and the like equipped with a deflection system arranged at the beam path and a control device operatively connected to the deflection system includes adjusting the excitation of the deflection system by means of the control device to direct the particle-beam for a selectable time period onto a location of the object whereat the object is to be investigated and, again adjusting the excitation of the deflection system by means of the control device to direct the particle-beam in the remaining time to another location of the object whereat the particle-beam passes through the object, the last-mentioned location being disposed laterally of the first-mentioned location.