Patents by Inventor Morten Kildemo

Morten Kildemo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of ellipsometric measurement, an ellipsometer and device for controlling the carrying out of layers using such method and apparatus
    Patent number: 5666200
    Abstract: This invention relates to a method and a device for the ellipsometric measurement of physical parameters representative of a sample.The measured values I.sub.om, I.sub.sm and I.sub.cm are calculated (51, 52) from the signal (50) which represents the measured intensity I(t).In a first step (55, 57), initial theoretical values I.sub.st /I.sub.ot and I.sub.ct /I.sub.ot are produced from initial estimations (56) of the physical parameters. In a second step (58, 59) subsequent estimations (59) of physical parameters are determined from which subsequent theoretical values I.sub.st /I.sub.ot and I.sub.ct /I.sub.ot are deduced (55, 57). The second step is reiterated to an Nth estimation (59) of the physical parameters, so as to minimise the difference between the theoretical values and those measured.The physical parameters are evaluated (54) in the course of the Nth estimation.
    Type: Grant
    Filed: February 27, 1996
    Date of Patent: September 9, 1997
    Assignee: Instruments S.A.
    Inventors: Bernard Drevillon, Morten Kildemo, Ramdane Benferhat