Patents by Inventor Moshe Beylin

Moshe Beylin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automated selection of X-ray reflectometry measurement locations
    Patent number: 7649978
    Abstract: The computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective location. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected location.
    Type: Grant
    Filed: September 12, 2008
    Date of Patent: January 19, 2010
    Assignee: Jordan Valley Semiconductors Ltd.
    Inventors: Isaac Mazor, Alex Dikopoltsev, Boris Yokhin, Dileep Agnihotri, Tzachi Rafaeli, Alex Tokar, David Berman, Moshe Beylin
  • Automated selection of x-ray reflectometry measurement locations
    Publication number: 20090074141
    Abstract: A computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective locations. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected locations.
    Type: Application
    Filed: September 12, 2008
    Publication date: March 19, 2009
    Applicant: JORDAN VALLEY SEMICONDUCTORS LTD.
    Inventors: Isaac Mazor, Alex Dikopoltsev, Boris Yokhin, Dileep Agnihotri, Tzachi Rafaeli, Alex Tokar, David Berman, Moshe Beylin
  • Automated selection of X-ray reflectometry measurement locations
    Publication number: 20070274447
    Abstract: A computer-implemented method for inspection of a sample includes defining a plurality of locations on a surface of the sample, irradiating the surface at each of the locations with a beam of X-rays, and measuring an angular distribution of the X-rays that are emitted from the surface responsively to the beam, so as to produce a respective plurality of X-ray spectra. The X-ray spectra are analyzed to produce respective figures-of-merit indicative of a measurement quality of the X-ray spectra at the respective locations. One or more locations are selected out of the plurality of locations responsively to the figures-of-merit, and a property of the sample is estimated using the X-ray spectra measured at the selected locations.
    Type: Application
    Filed: May 15, 2007
    Publication date: November 29, 2007
    Inventors: Isaac Mazor, Alex Dikopoltsev, Boris Yokhin, Tzachi Rafaeli, Alex Tokar, David Berman, Moshe Beylin