Patents by Inventor Mostafa BAGHBANZADEH

Mostafa BAGHBANZADEH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • GROWTH MONITOR SYSTEM AND METHODS FOR FILM DEPOSITION
    Publication number: 20240120197
    Abstract: The present disclosure generally relates to process chambers for semiconductor processing. In one embodiment, a growth monitor for substrate processing is provided. The growth monitor includes a sensor holder and a crystal disposed in the sensor holder having a front side and a back side. An opening is formed in the sensor holder exposing a front side of the crystal. A gas inlet is disposed through the sensor holder to a plenum formed by the back side of the crystal and the sensor holder. A gas outlet is fluidly coupled to the plenum.
    Type: Application
    Filed: December 13, 2023
    Publication date: April 11, 2024
    Inventors: Zhepeng CONG, Mostafa BAGHBANZADEH, Tao SHENG, Enle CHOO
  • Growth monitor system and methods for film deposition
    Patent number: 11848202
    Abstract: The present disclosure generally relates to process chambers for semiconductor processing. In one embodiment, a growth monitor for substrate processing is provided. The growth monitor includes a sensor holder and a crystal disposed in the sensor holder having a front side and a back side. An opening is formed in the sensor holder exposing a front side of the crystal. A gas inlet is disposed through the sensor holder to a plenum formed by the back side of the crystal and the sensor holder. A gas outlet is fluidly coupled to the plenum.
    Type: Grant
    Filed: November 30, 2021
    Date of Patent: December 19, 2023
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Zhepeng Cong, Mostafa Baghbanzadeh, Tao Sheng, Enle Choo
  • Growth Monitor System and Methods for Film Deposition
    Publication number: 20230170211
    Abstract: The present disclosure generally relates to process chambers for semiconductor processing. In one embodiment, a growth monitor for substrate processing is provided. The growth monitor includes a sensor holder and a crystal disposed in the sensor holder having a front side and a back side. An opening is formed in the sensor holder exposing a front side of the crystal. A gas inlet is disposed through the sensor holder to a plenum formed by the back side of the crystal and the sensor holder. A gas outlet is fluidly coupled to the plenum.
    Type: Application
    Filed: November 30, 2021
    Publication date: June 1, 2023
    Inventors: Zhepeng CONG, Mostafa BAGHBANZADEH, Tao SHENG, Enle CHOO