Abstract: Aspects relate to mechanisms for enhancing the coupling of scattered light from a sample under test into a spectrometer. An optical device can include a reflective surface positioned apart from the sample and configured to receive a first portion of scattered light from the sample and to redirect the first portion of the scattered light back to one or more discrete spots on the sample in a non-random manner to produce redirected scattered light from the sample. The spectrometer may then be configured to receive coupled light from the sample including at least a portion of the redirected scattered light.

Abstract: Aspects relate to a compact material analyzer including a light source, a detector, and a module including a first optical window on a first side of the module, a second optical window on a second side of the module opposite the first side, and a light modulator. The light source produces input light at a high power that is passed through the first optical window to the light modulator. The light modulator is configured to attenuate the input light, produce modulated light based on the input light, and direct the modulated light through the second optical window to the sample. The modulated light produced by the light modulator is at a lower power safe for the sample. The detector is configured to receive output light from the sample produced from interaction with the modulated light through the second optical window and to detect a spectrum of the output light.

Abstract: Aspects relate to a spectral modeling system for building chemometrics (calibration) models for spectral devices targeting ultra-wide-scale deployment. The spectral modeling system includes a spectral converter for generating a plurality of artificial spectra using spectral data of a plurality of samples measured by a subset of a plurality of spectral devices and spectral device characteristics representing spectral variations in the plurality of spectral devices. The spectral modeling system further includes a chemometrics engine for generating a chemometrics model for one or more parameters associated with the plurality of samples based on the spectral data and the plurality of artificial spectra.

Abstract: Aspects relate to a handheld spectroscopy scanner including an optical window configured to receive a sample and a housing having the optical window thereon. The housing further includes therein a light source and a spectral sensor including a light modulator and a detector. The scanner housing further includes a processor configured to receive a spectrum of the sample from the spectral sensor based on interaction of light produced by the light source with the sample on the optical window. The processor is further configured to produce spectral data based on the sample spectrum for input to an artificial intelligence engine to produce a result based on the spectral data. In addition, the scanner housing may include a flange holding the light source and a heat sink configured to dissipate the internal heat generated. The housing further includes a cavity forming a handle for easy operation of the handheld spectroscopy scanner.

Abstract: Aspects relate to mechanisms for mass screening of samples. A portable laboratory device based on spectroscopic analysis of samples containing analytes under test can facilitate the mass screening. The portable laboratory device can include a sample head including a structure configured to facilitate application of the sample to the sample head and an optical measurement device including one or more light sources and a spectrometer. Light from the light source(s) incident on the sample may be directed to the spectrometer to obtain a spectrum of the sample. The optical measurement device can further include a data transfer device configured to provide the spectrum obtained by the spectrometer to a spectrum analyzer to produce a result from the spectrum.

Abstract: Aspects relate to an optical device providing a large spot size spectrometer. The optical device includes an optical head, an optical window, and a spectrometer. The optical head includes a plastic molded part having an aperture and a plurality of reflectors around the aperture formed therein. Each reflector may include a respective lamp assembled therein. The optical window is configured to receive a sample, to pass input light from the lamps to the sample and to pass scattered light from the sample towards the aperture. The aperture is configured to filter a first portion of scattered light containing unusable sample information and to pass a second portion of the scattered light to the spectrometer.

Abstract: A shadow mask having two or more levels of openings enables selective step coverage of micro-fabricated structures within a micro-optical bench device. The shadow mask includes a first opening within a top surface of the shadow mask and a second opening within the bottom surface of the shadow mask. The second opening is aligned with the first opening and has a second width less than a first width of the first opening. An overlap between the first opening and the second opening forms a hole within the shadow mask through which selective coating of micro-fabricated structures within the micro-optical bench device may occur.

Abstract: Aspects relate to a compact material analyzer including a light source, a detector, and a module including a first optical window on a first side of the module, a second optical window on a second side of the module opposite the first side, and a light modulator. The light source produces input light at a high power that is passed through the first optical window to the light modulator. The light modulator is configured to attenuate the input light, produce modulated light based on the input light, and direct the modulated light through the second optical window to the sample. The modulated light produced by the light modulator is at a lower power safe for the sample. The detector is configured to receive output light from the sample produced from interaction with the modulated light through the second optical window and to detect a spectrum of the output light.

Abstract: Aspects relate to mechanisms for increasing the field of view of a spectrometer. An optical device may be configured to simultaneously couple light from different locations (spots) on a sample to the spectrometer to effectively increase the spectrometer field of view. The optical device can include a beam combiner and at least one reflector to reflect light beams from respective spots on the sample towards the beam combiner. The beam combiner can combine the received light beams from the different spots to produce a combined light beam that may be input to the spectrometer.

Abstract: Aspects of the disclosure relate to a self-referenced spectrometer for providing simultaneous measurement of a background or reference spectral density and a sample or other spectral density. The self-referenced spectrometer includes an interferometer optically coupled to receive an input beam and to direct the input beam along a first optical path to produce a first interfering beam and a second optical path to produce a second interfering beam, where each interfering beam is produced prior to an output of the interferometer. The spectrometer further includes a detector optically coupled to simultaneously detect a first interference signal produced from the first interfering beam and a second interference signal produced from the second interfering beam, and a processor configured to process the first interference signal and the second interference signal and to utilize the second interference signal as a reference signal in processing the first interference signal.

Abstract: Aspects relate to mechanisms for increasing the field of view of a spectrometer. An optical device may be configured to simultaneously couple light from different locations (spots) on a sample to the spectrometer to effectively increase the spectrometer field of view. The optical device can include a beam combiner and at least one reflector to reflect light beams from respective spots on the sample towards the beam combiner. The beam combiner can combine the received light beams from the different spots to produce a combined light beam that may be input to the spectrometer.

Abstract: Aspects relate to an integrated optical probe card and a system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures with an in-plane optical axis. On-wafer optical screening of optical MEMS structures may be performed utilizing one or more micro-optical bench components to redirect light between an out-of-plane direction that is perpendicular to the in-plane optical axis to an in-plane direction that is parallel to the in-plane optical axis to enable testing of the optical MEMS structures with vertical injection of the light.

Abstract: A shadow mask having two or more levels of openings enables selective step coverage of micro-fabricated structures within a micro-optical bench device. The shadow mask includes a first opening within a top surface of the shadow mask and a second opening within the bottom surface of the shadow mask. The second opening is aligned with the first opening and has a second width less than a first width of the first opening. An overlap between the first opening and the second opening forms a hole within the shadow mask through which selective coating of micro-fabricated structures within the micro-optical bench device may occur.

Abstract: A shadow mask having two or more levels of openings enables selective step coverage of micro-fabricated structures within a micro-optical bench device. The shadow mask includes a first opening within a top surface of the shadow mask and a second opening within the bottom surface of the shadow mask. The second opening is aligned with the first opening and has a second width less than a first width of the first opening. An overlap between the first opening and the second opening forms a hole within the shadow mask through which selective coating of micro-fabricated structures within the micro-optical bench device may occur.

Abstract: Aspects of the disclosure relate to a self-referenced spectrometer for providing simultaneous measurement of a background or reference spectral density and a sample or other spectral density. The self-referenced spectrometer includes an interferometer optically coupled to receive an input beam and to direct the input beam along a first optical path to produce a first interfering beam and a second optical path to produce a second interfering beam, where each interfering beam is produced prior to an output of the interferometer. The spectrometer further includes a detector optically coupled to simultaneously detect a first interference signal produced from the first interfering beam and a second interference signal produced from the second interfering beam, and a processor configured to process the first interference signal and the second interference signal and to utilize the second interference signal as a reference signal in processing the first interference signal.

Abstract: A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces therein. The process further includes removing the temporary structure from an optical path of the micro-optical bench device.

Abstract: Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.

Abstract: Aspects of the disclosure relate to an integrated optical probe card and a system for performing wafer testing of optical micro-electro-mechanical systems (MEMS) structures with an in-plane optical axis. On-wafer optical screening of optical MEMS structures may be performed utilizing one or more micro-optical bench components to redirect light between an out-of-plane direction that is perpendicular to the in-plane optical axis to an in-plane direction that is parallel to the in-plane optical axis to enable testing of the optical MEMS structures with vertical injection of the light.

Abstract: Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.

Abstract: A Micro-Electro-Mechanical System (MEMS) apparatus provides for self-calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.