Abstract: A cleaning method includes (A) and (B) described below. (A) A first processing liquid is supplied to a central portion of a top surface of a substrate from a first nozzle and, also, a second processing liquid is supplied to a periphery of the top surface of the substrate from a second nozzle in a state that the substrate is horizontally held inside a cup and the substrate is rotated in a first direction about a vertical rotation shaft. (B) During a discharge of the second processing liquid by the second nozzle, the second nozzle is moved in a diametrical direction of the substrate between a first position where a discharge line of the second nozzle touches the periphery of the top surface of the substrate and a second position where the discharge line of the second nozzle deviates from the substrate.

Abstract: There is provided a substrate processing apparatus which includes: an exhaust pipe configured to selectively discharge an exhaust gas generated by a substrate process to a first pipe or a second pipe; a liquid supply part configured to supply a cleaning liquid to the exhaust pipe; a discharge destination setting part configured to set a discharge destination of the exhaust gas to the first pipe or the second pipe by rotating the exhaust pipe; and a controller configured to control the discharge destination setting part to rotate the exhaust pipe. The controller is further configured to control the liquid supply part to supply the cleaning liquid to the rotating exhaust pipe.

Abstract: There is provided a substrate processing apparatus which includes: an exhaust pipe configured to selectively discharge an exhaust gas generated by a substrate process to a first pipe or a second pipe; a liquid supply part configured to supply a cleaning liquid to the exhaust pipe; a discharge destination setting part configured to set a discharge destination of the exhaust gas to the first pipe or the second pipe by rotating the exhaust pipe; and a controller configured to control the discharge destination setting part to rotate the exhaust pipe. The controller is further configured to control the liquid supply part to supply the cleaning liquid to the rotating exhaust pipe.

Abstract: There is provided a substrate processing apparatus which includes: an exhaust pipe configured to selectively discharge an exhaust gas generated by a substrate process to a first pipe or a second pipe; a liquid supply part configured to supply a cleaning liquid to the exhaust pipe; a discharge destination setting part configured to set a discharge destination of the exhaust gas to the first pipe or the second pipe by rotating the exhaust pipe; and a controller configured to control the discharge destination setting part to rotate the exhaust pipe. The controller is further configured to control the liquid supply part to supply the cleaning liquid to the rotating exhaust pipe.

Abstract: There is provided a substrate processing apparatus which includes: an exhaust pipe configured to selectively discharge an exhaust gas generated by a substrate process to a first pipe or a second pipe; a liquid supply part configured to supply a cleaning liquid to the exhaust pipe; a discharge destination setting part configured to set a discharge destination of the exhaust gas to the first pipe or the second pipe by rotating the exhaust pipe; and a controller configured to control the discharge destination setting part to rotate the exhaust pipe. The controller is further configured to control the liquid supply part to supply the cleaning liquid to the rotating exhaust pipe.

Abstract: An image recording apparatus includes: a casing; a sheet-feeder tray having a supporting surface for supporting a sheet-shaped recording medium; a recording unit which is configured to record an image on the recording medium fed from the sheet-feeder tray; a discharge roller pair configured to discharge, from the casing, the recording medium on which the image has been recorded by the recording unit; an opening-closing member which is provided on the downstream of the discharge roller pair in a direction in which the recording medium is discharged by the discharge roller pair and is rotatable between a first position where a discharging slot of the recording medium discharged by the discharge roller pair is closed and a second position where the discharging slot is open; and a restricting mechanism configured to restrict the rotation of the opening-closing member from the second position to the first position.

Abstract: An image recording apparatus includes: a casing; a sheet-feeder tray having a supporting surface for supporting a sheet-shaped recording medium; a recording unit which is configured to record an image on the recording medium fed from the sheet-feeder tray; a discharge roller pair configured to discharge, from the casing, the recording medium on which the image has been recorded by the recording unit; an opening-closing member which is provided on the downstream of the discharge roller pair in a direction in which the recording medium is discharged by the discharge roller pair and is rotatable between a first position where a discharging slot of the recording medium discharged by the discharge roller pair is closed and a second position where the discharging slot is open; and a restricting mechanism configured to restrict the rotation of the opening-closing member from the second position to the first position.